XYZ Linear Lift Positioner
XYZ Positioning Stages – compact stacked

782300:143.26

Compact XYZ Linear-Lift Positioning System for Dynamic Precision Applications

The XYZ positioning system combines two highly dynamic linear stages for X and Y motion with a vertical lifting stage for the Z axis to create a compact multi-axis system. The platform enables fast and highly precise linear positioning in three degrees of freedom and is ideally suited for scanning, inspection, alignment, and automation tasks. The X and Y axes are driven by dynamic linear motors (iron core), while the Z axis uses an AC servo motor with a ball screw drive for stable vertical positioning.

Travel ranges of 650 mm (X), 300 mm (Y), and 25 mm (Z)

Repeatability up to ± 0.4 µm in X/Y and ± 0.7 µm in Z

Highly dynamic operation up to 1580 mm/s

Dynamic linear motors for fast motions and high throughput

Vertical axis with ball screw drive for highly stable vertical focus

Linear scale on all axes, optionally with resolutions up to 0.001 µm

Options:

Integration of a DT240 rotary stage for additional rotational degrees of freedom
Sample holders, custom adapter plates, and process mounts
Enclosures and integrated safety concepts (emergency stop, door interlock switches, light curtains, laser scanners, STO, SLS)
Cleanroom versions up to ISO 6 (higher on request)
Beam versions: UV (DUV / EUV / X-ray / Gamma on request)
Custom adaptation for scanning, inspection, or automation processes

Custom Extensions and Adaptations

The modular XYZ system can be flexibly adapted to different process requirements. Extensions include additional rotary axes, custom interfaces for sensors, cameras, or process tools, as well as mechanical and safety integration into existing equipment. Thanks to its modular design, dynamics, precision, and functionality can be optimally tailored to the respective application.

Applications

Optical inspection systems, automated scanning processes, microscopy, sensor positioning, precision assembly, semiconductor and wafer inspection, laser processing, material and surface analysis, laboratory automation, research & development, industrial testing and automation systems

Specifications

782300:143.26		X	Y	Z
Standard System		PLT320-DLM-L	PLT240-DLM-L	HT240-AC-L
Travel	[mm]	650	300	25
Repeatability unidirectional	[µm]	± 0.4	± 0.4	± 0.7
Repeatability bidirectional	[µm]	± 0.5	± 0.5	± 1.2
Positioning speed	[mm/s]	790	530	8
Max. speed	[mm/s]	1580	1060	16
Max. load	[N]	150	150	410
Weight	[kg]	135
Length x width x height	[mm]	1160 x 710 x 320
Drive				Ball Screw
Spindle type				1412.547/1.12.145.175 P3P
Spindle lead				1
Guide		Profile Rail	Profile Rail	Profile Rail
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	AC Servo
Feedback		Linear Scale	Linear Scale	Linear Scale
Resolution Measuring system		0.1 µm standard, optionally up to 0.001 µm
Optional features		rotary stage (DT240), brake, sample holder, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic

Changes and errors excepted. Values apply to single axes with our controllers. The values stated here are typical for a standard configuration. Significantly improved performance can be achieved through custom adaptations and with precise knowledge of your application.