Miniatur XYZ-Stage HT-KT210
XYZ Positioning Stages – compact stacked

782300:235.26

Compact XYZ Stage with Integrated Controller

The integrated XYZ positioning system combines the KT210 cross stage with a vertical lifting stage HT210 (Z) into an extremely compact and fully integrated unit. The stage enables precise linear motion in X and Y (100 mm each) as well as fine Z positioning with a 7 mm travel. By integrating motors, cable management, and controller into a closed system, the platform is ideally suited for applications with limited installation space and high demands on precision and system integration.

Compact design: only 210 × 210 × 82 mm with full 3-axis integration

Repeatability up to ±2.5 µm (Z)

Direct feedback via linear scales on all axes

High dynamics up to 150 mm/s while maintaining a compact footprint

Options:

Integrated controller with USB or CAN interface
Remote access and system integration via CAN networks
High-resolution measurement systems up to 0.001 µm
Cleanroom versions up to ISO 6 (higher on request)
Beam variants: UV / DUV / EUV (X-ray on request)
Custom adaptations for optics, sensor, or microscopy applications

Integrated Controller with USB Interface

Programming and system integration are easily achieved via USB or CAN bus. The CAN interface enables the positioning stage to transmit status data and provide feedback on program states and overall system condition via the network. This is realized through an integrated controller, invisible from the outside, with its own program memory. With appropriate CAN host integration, users can also access the positioning system remotely via the internet.

Application Fields

Microscopy and imaging applications, optical inspection systems, sensor and camera positioning, laboratory automation, life science applications, semiconductor and wafer inspection, compact measurement and analysis systems, research & development

Specifications

HT-KT210		X	Y	Z
Standard system		KT210-10-EDLM3-USB	KT210-10-EDLM3-USB	HT210-8-DC-L-RS-232
Travel	[mm]	100	100	7
Repeatability unidirectional	[µm]	± 2.7	± 2.7	± 2.5
Repeatability bidirectional	[µm]	± 2.8	± 2.8	± 5.2
Positioning accuracy	[µm]	± 13.6	± 13.6	± 2
Flatness deviation	[µm]	± 4	± 4	± 0.8
Straightness deviation	[µm]	± 3	± 3	± 0.8
Positioning speed	[mm/s]	100	100	0.25
Max. speed	[mm/s]	200	200	0.5
Max. acceleration	[m/s²]	2	2	0.05
Max. load Fx	[N]	45	45	45
Max. load Fy	[N]	45	45	45
Max. load Fz	[N]	45	45	45
Weight	[kg]	7.5
Length x width x height	[mm]	210 x 210 x 82
Motor		dynamic linear motor (ironless)	dynamic linear motor (ironless)	DC motor
Drive		Direct drive	Direct drive	Lead screw M5x0.5
Bearing		Profile rail	Profile rail	Profile rail
Feedback		Linear scale	Linear scale	Linear scale
Resolution measurement system		optional up to 0.1 µm, 0.001 µm or better
Optional features		gantry setup for cameras or sensors, adapter plate, chuck, base plate (granite / aluminum), frame, enclosure, customized vibration isolation using damping rubber layers or pneumatic dampers, safety concept and systems (emergency stop, door switches, light curtains, laser scanners, STO, SLS)
Versions for Cleanroom		ISO 6 (higher on request)
Versions for Beam		UV (DUV, EUV, X-ray on request)
Versions for Vacuum		-