XY-Z Microscopy Stage (ISO 6) | XY stepper motor, ball screw, crossed roller | Z manual | Travel 200 × 200 × M mm, Rep 3 µm, Load 11 kg, Speed 30 mm/s
XY-Z Split Axes Systems

782300:265.26

High-Stability Positioning for Microscopy and Sensor Applications

The positioning system enables highly precise linear motion in X and Y as well as optional Z positioning for accurate alignment of microscopes, cameras, or sensors relative to the sample. While the sensor system remains stationary, the object is moved with high stability and repeatability. This motion task is ideal for imaging, optical, and sensor-based measurement processes where position, focus, and scan location must be precisely controlled.

Ideal for precise XY scanning movements with a stationary process head or sensor

Optional Z vertical axis for focus adjustment or height positioning of sensors

Flexible adaptability for microscopes, cameras, and sensor systems

High long-term stability through internally mounted motors, precision guides, and a rigid mechanical structure

Maintenance-free concept with a cost-optimized drive design

Options:

Customizable travel ranges and system dimensions
Designs with or without frame and base plate made of granite or aluminum
Cleanroom configurations up to ISO Class 6 (higher on request)
Individual cable routing for sensor and camera systems
Integration into customer-specific overall systems

Custom Extensions and Adaptations

The system can be specifically adapted to a wide range of optical, biological, or sensor-based measurement tasks. Extensions include dedicated sensor mounts, focus axes, customized control concepts, cleanroom compatibility, temperature or vibration management, as well as mechanical interfaces for customer-specific sample holders or microscope setups.

Application Fields

Semiconductor inspection and wafer microscopy, high-resolution light and fluorescence microscopy, biotechnology and life science, cell and tissue analysis, lab-on-a-chip inspection, microfluidics, material and surface analysis, sensor characterization, optical metrology, research and development

Specifications

782300:265.26		X	Y	Z
Standard system		KT310-SM	KT310-SM	manual
Travel	[mm]	200	200
Repeatability unidirectional	[µm]	± 3	± 3
Repeatability bidirectional	[µm]	± 5	± 5
Positioning speed	[mm/s]	30	30
Max. speed	[mm/s]	60	60
Max. load	[N]	110	110
With XY Stage	[mm]	310	310
Dimensions (L × W × H)	[mm]	550 × 315 × 550
Motor		Stepper motor	Stepper motor
Drive		1214.590/1.8.245.295 P3P	1214.590/1.8.245.295 P3P
Leed	[mm]	1	1
Bearing		Cross roller bearing	Cross roller bearing
Feedback		Open Loop	Open Loop
Optional features		Customizable travels and system dimensions, configuration with or without frame as well as base plate made of granite or aluminum, cleanroom configurations up to ISO class 6 (higher on request), customized cable routing for sensor and camera systems, integration into customer-specific complete systems
Cleanroom versions		up to cleanroom class ISO 6 (higher on request)
Beam variants		-
Magnetism variants		magnetic
Vacuum variants		on request