MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5°
XY Theta Stage

782476:001.26
MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° - XY Theta Stage

 

Surface aligner with stepper motor and ball screw

With this aligner, second translational movements of 15 mm in the plane and a rotation around the vertical of up to ± 5 degrees are realized. The motion R (Theta) results from the XY combination. The aligner is designed for loads up to 5 kg. The transmitted light aperture allows transfer measurement.

Outstanding precision in high vacuum

  • Ideal for transfer measurements in vacuum up to 10-6 mbar
  • Designed for large samples with an aperture of 235 mm
  • High repeatability up to 1 µm with a load capacity of 5 kg
  • Ideal force transmission due to the use of the backlash-free ball screw 1214
  • Optimized price/performance ratio with precise operating parameters

Options:

  • Adaptation to the process: aperture, holder, feeder, sensor
  • Configuration for clean room ISO 14644-1 (up to class 1 on request)
  • Individual design with rack, vibration isolation, enclosure
  • Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

HV / UHV wafer inspection, semiconductor inspection, semiconductor alignment, alignment of samples at high vacuum, analysis, incident and transmission light measurements, transfer measurements, assembly tasks, alignment of parts before joining

 

782476:001.26

  

X

Y

Rz

Standard System

 

LA85

LA85

 LA85

Travel

[mm; deg]

 ± 15

± 15

 ± 5

Repeatability unidirectional

[µm; deg]

± 0.8

± 0.8

 ± 0.8

Repeatability bidirectional

[µm; deg]

± 1

± 1

 ± 1

Positioning speed

[mm/s; deg/s]

 1 1

1
Max. speed

[mm/s; deg/s]

 2 2 2

Max. load

[N]

50

 50 50

Motor

 

Stepper Motor

Stepper Motor

Stepper Motor

 

Drive

 

 Ball Screw

Ball Screw

 Ball Screw

Feedback

  

Open Loop

Open Loop

 Open Loop
Aperture

[mm]

 235
Length x width x height

[mm]

 545 x 484 x 95

 

Used Standard Components

LA85-SM

Focus axis (ball screw), travel 25 - 50 mm, rep ± 1.6 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages    Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

  • Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
  • Electrodynamic linear motors (ironless or iron-core).
  • Piezomotors such as Piezo-Legs® or Nanomotion®.

Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references