XYZ Positioning System with XY Stage (cleanroom ISO 6) | XY cross roller, ball screw, stepper motor | Z lead screw | travel 305 x 305 x 200 mm
XYZ Split Axes Systems

782453:024.26

Modular, cleanroom-compatible 3-axis system

This positioning system includes the XY-Stage KT470 on a granite structure with a manual Z-vertical unit. This combination is suitable for the flexible and modular design of production systems / inline processes and can be optionally extended with rotary or motorized Z-axes.

Ideal for flexible set-up and expansion of cleanroom applications

Holder for exchangeable process heads (microscope, sensor, ...)

Flexible maintenance thanks to quick system replacement on the granite structure

Options:

Extendable travel range XY 200 - 350 mm, Z 200 - 400 mm
Adaptation to the process: aperture, sample holder, extension of the Z-axis
Customized design with frame, vibration isolation, housing, etc.
Customized development with 3D design, prototypes, series production

Fields of application

Positioning of microscopes with sample feeding, inspection up to cleanroom ISO 6 to 12 inch / 300 x 300 mm, interferometry and metrology, microscopy, material testing, probecards and printed circuit boards, quality assurance, microscopy in the cleanroom, surface inspection, wafer inspection

Specifications

782453:030.26		X	Y	Z
Standard System		KT470-SM	KT470-SM	-
Travel	[mm]	305	305	200
Repeatability unidirectional	[µm]	± 2.3	± 2.3	14,28571429
Repeatability bidirectional	[µm]	± 3.3	± 3.3	20
Positioning speed	[mm/s]	20	20	-
Max. speed	[mm/s]	40	40	-
Max. load	[N]	227	227	196
Weight	[kg]	325
Max. sample dimension	[Ø]	12 inch / 300 mm
Length x width x height	[mm]	500 x 950 x 740
Spindle type		Ball Screw 1214.511/1.12.361.412 P5P / 225177		Lead Screw
Spindle lead		1	1
Guide		cross roller brearings	cross roller brearings
Motor		Stepper Motor	Stepper Motor	Handwheel
Feedback		Open Loop	Open Loop
Optional features		Travels 200 - 350 mm, adaption plate, chuck, base plate (granite / aluminum), frame, housing, custom vibration decoupling by damping rubber pad or pneumatic damper, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (higher on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)