XXL XYZ Portal with Vacuum Chuck | XY Stepper Motor, Ball Screw, Profile Rail, Linear Scale | Z Cross Roller | Travel 1000 x 1000 x 100 mm
Portals

782300:179.26
XXL XYZ Portal with Vacuum Chuck | XY Stepper Motor, Ball Screw, Profile Rail, Linear Scale | Z Cross Roller | Travel 1000 x 1000 x 100 mm - Portals

 

High-precision metrology tasks on 1000 x 1000 mm

This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system PMT160-SM is fixed to the traverse axis for the customerspecific sensor, which is used for the focus variation. The axes are fully enclosed, which prevents contamination and interference.
 

Automated inspection in 3-shift operation

  • Ideal for automated surface inspection with focus variation
  • Designed for sample weights up to 50 kg (excluding vacuum stage)
  • Passive vibration damping and decoupling of building vibrations (standard measuring chamber quality class 3 according to VDI 2627)
  • Enormously long lifetime with 1,000,000 full cycles and a maintenance interval of 500,000 full cycles resp. every 2 years
Optionally expandable:
  • With linear scale for accuracies up to 0.3 µm
  • Modular system configuration
  • Safety cabinet
  • Special configuration for semiconductors, biotechnology, pharmaceuticals
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Ready-to-use motion control with pre-configured controller incl. sample software
  • Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

 

782300:179.26

 

X

Y

Z

Standard System PLT320-SMPLT320-SMPMT160-SM

Travel

[mm]

10001000100

Repeatability unidirectional

[µm]

± 3.9± 3.9± 1.9

Repeatability bidirectional

[µm]

± 4.4± 4.4± 2.4

Positioning speed

[mm/s]

303010

Max. load

[N]

490490± 45

Motor

 

Stepper Motor

Stepper Motor

Stepper Motor

Drive

 

Ball Screw

Ball Screw

Ball Screw

Guide

 

Profile Rail

Profile Rail

Cross roller bearings

Feedback

 

Open Loop

Open Loop

Open Loop

Length x width x height[mm]2250 x 1500 x 1500
 

 

Used Standard Components

PMT160-SM

High precision linear stage with 160 mm width. Driven by ball screw and stepper motor.

PLT320-SM

Heavy duty linear stage, 300 - 1000 mm travel, 3.9 µm repeatability, 310 kg load

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

KGT ETA+

Energy-efficient ETA+ ball screws with reduced friction and high rigidity

KGT ETA+

Energy-efficient ETA+ ball screws with reduced friction and high rigidity

Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
E-mail

Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

Our references