XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi belt, DC Motor | Travel 300 x 300 mm x 360°
Combinations of industrial axes

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi belt, DC Motor | Travel 300 x 300 mm x 360° - Combinations of industrial axes


Precise and highly dynamic for samples up to 150 mm / 6"

The XY Phi positioning system consists of two PLT165 linear stages (X and Y axes) and a DT200 rotary stage (Phi axis). The dust and particle protection in industrial environments is ensured by the protected housing and metal strip cover.

  • Ideal for flexible set-up and expansion of cleanroom systems
  • High accuracy up to 0.4 µm / 0. 004°
  • High accelerations and speeds up to 1000 mm/s
  • Outstanding low heat emission at frequent start and stop phases
  • Designed for maintenance-free 24/7 operation in clean room environments


  • Various, high-resolution measuring systems
  • Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
  • Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests

Fields of application

Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology


Standard SystemPLT165-300-DLMPLT165-300-DLMDT200-DC-R
Travel[mm; deg]300300n x 360
Repeatability unidirectional  [µm; deg]± 0.4± 0.4± 0.004
Repeatability bidirectional  [µm; deg]± 0.5± 0.5± 0.007
Positioning speed[mm/s; deg/s]50050035
Max. speed[mm/s; deg/s]1000100070
Max. load[N]606068
Length x width x height[mm]600 x 690 x 205
Aperture diameter[mm]66
Max. sample diameter150 mm / 6" (optional larger as special version)
Guide Profile RailProfile Rail 
Motor Iron Core Dynamic Linear MotorIron Core Dynamic Linear MotorDC Motor
Feedback Linear ScaleLinear ScaleMotor-Encoder
Optional featuresangular scale, adaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variantsup to clean room class ISO 6 (on request)
Beam variantsUV (DUV, EUV, X-ray, gamma on request)
Variants magnetismmagnetic


Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:


Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0

Nadine Strudel
Consulting International

T +49 (0) 351 88585-44


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