XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball screw drive | Phi belt, DC motor | Travel 450 x 350 x 16 mm x 45°
Combinations of industrial axes

782300:145.26
XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball screw drive | Phi belt, DC motor | Travel 450 x 350 x 16 mm x 45° - Combinations of industrial axes

 

Precise and highly dynamic for samples up to 150 mm / 6"

The system consists of two linear stages PLT320 (X and Y Axes), a lifting stage HT160 (Z Axis) and a rotary stage DT200 (Phi Axis).

  • Ideal for flexible set-up and expansion of cleanroom systems
  • High accuracy up to 0.4 µm / 0. 004°
  • High accelerations and speeds up to 1000 mm/s
  • Outstanding low heat emission at frequent start and stop phases
  • Designed for maintenance-free 24/7 operation in clean room environments

Options:

  • Various, high-resolution measuring systems
  • Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
  • Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests
 

Fields of application

Low-particle XYZ-R linear lift rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology

 

782300:145.26XYZRz
Standard SystemPLT320-DLM-LPLT320-DLM-LHT160-DC-RDT200-DC-R/W
Travel[mm; deg]4503501645
Repeatability unidirectional  [µm; deg]± 0.4± 0.4± 1.6± 0.004
Repeatability bidirectional  [µm; deg]± 0.5± 0.5± 2.6± 0.007
Positioning speed[mm/s; deg/s]500500835
Max. speed[mm/s; deg/s]100010001670
Max. load[N]2502504568
Weight[kg]125
Length x width x height[mm]960 x 860 x 335
Aperture diameter[mm]66
Max. sample diameter150 mm / 6" (optional larger as special version)
Spindle type  1214.564/1.8.88.124 T5; o. Zapfen
Spindle lead  1 
Guide Profile RailProfile RailCross Roller BearingBelt
Motor Iron Core Dynamic Linear MotorIron Core Dynamic Linear MotorDC MotorDC Motor
Feedback Linear ScaleLinear ScaleMotor-EncoderMotor-Encoder
Resolution Measuring system0.1 µm standard, optionally up to 0.001 µm
Optional featuresadaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variantsup to clean room class ISO 6 (on request)
Beam variantsUV (DUV, EUV, X-ray, gamma on request)
Variants magnetismmagnetic

 


Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
E-mail

Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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