Vacuum linear stages and linear axes

Depending on the application, we offer linear tables with a variety of different drives and guides for residual pressures up to 10-6mba - or even better. Within a series, the modular linear tables can be easily combined with each other.

LTP90-SM-UHV
Vacuum / Cleanroom linear stages and axes

236971, 236970, 236967, 236964
LTP90-SM-UHV - Vacuum / Cleanroom linear stages and axes

 

Precision linear stage for UHV applications

UHV 10E-8 mbar, UV, DUV, ISO 6 | Travel 50 - 200 mm | Rep ± 2.6 µm | Load 16.3 kg | Speed 13 mm/s

  • Vacuum: up to 10-8 mbar, liquid lubrication
  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Radiation: UV, DUV, EUV, X-ray and gamma on request
  • Compact UHV linear stage with precise guidance and optional motor encoder
Optionally configurable:
  • Travel variants from 50 mm to 200 mm
  • PFAS-free lubrication as well as custom additional bore holes and adapters
  • Optional motor encoder
  • Versions for cleanroom, vacuum and radiation-related applications

Robust linear stage for precise positioning tasks in UHV

The LTP90-SM-UHV is a compact precision linear stage for ultrahigh vacuum applications. The series combines stepper motor, D8 p2 ball screw and stainless steel cross roller guidance into a robust and precise solution for linear positioning tasks. With travel ranges from 50 mm to 200 mm, repeatability of ± 2.6 µm and a maximum load of 160 N in Fy and Fz, the system is suitable for demanding integration tasks in vacuum, cleanroom and photonics systems.

Applications

UHV systems, optics and photonics systems, sensor and sample positioning, laboratory automation, measurement and inspection systems, cleanroom processes as well as research and development

 

LTP90-SM UHV   -50-SM -120-SM -150-SM -200-SM
Travel [mm] 50 120 150 200
Repeatability unidirectional [µm] ± 2.1 ± 2.1 ± 2.1 ± 2.1
Repeatability bidirectional [µm] ± 2.6 ± 2.6 ± 2.6 ± 2.6
Positioning speed [mm/s] 13 13 13 13
Max. speed [mm/s] 20 20 20 20
Max. load Fx [N] 20 20 20 20
Max. load Fy [N] 160 160 160 160
Max. load Fz [N] 160 160 160 160
Length [mm] 229 299 329 379
Width [mm] 90 90 90 90
Height [mm] 41.3 41.3 41.3 41.3
Weight [kg] 1.61 2.11 2.61 3.11
Aperture [mm] 0 0 0 0
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] not
Max. bakeout temperature [deg] 100
Screw type   Ball Screw D8 p2
Screw lead   2
Bearing   Stainless steel cross roller
Motor   Stepper Motor
Feedback   optional motor encoder
Optional features   PFAS-free lubrication, additional bore holes, adapters
Variants cleanroom   up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum [mbar] 10E-8

 

Used Standard Components

LA85-DC

Focus axis (ball screw), travel 25 - 50 mm, rep ± 0.5 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s

LA340-EDLM

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s

LA250-DLM

High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to 3090 mm/s

LA110-EDLM

High performance stage (linear motor), travel 250 - 750 mm, rep ± 0.4 µm, load 4.5 kg, speed 1500 mm/s

LA85-SM

Focus axis (ball screw), travel 25 - 50 mm, rep ± 1.6 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s

PMT160-DC

Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.7 µm, load 4,5 kg, speed 60 mm/s

PMT160-SM

Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.9 µm, load 15 kg, speed 20 mm/s

PMT160-EDLM

High precision linear stage (linear motor), travel 50 - 260 mm, rep ± 0.3 µm, load 1,4 kg, speed 375 mm/s

PMT160-NM

High precision linear stage (nanomotion), travel 50 - 250 mm, rep ± 0.3 µm, load 8 kg, speed 75 mm/s

LTP30-DC

Slim linear stage (ball screw), travels 50 - 150 mm, rep ± 1.5 µm, load 4.5 kg, speed 60 mm/s

Your customized system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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