Vacuum linear stages and axes
Compact focus linear stage
HV / UHV, 25 mm travel, 1.6 µm repeatability, 4 kg load
Easy to integrate for horizontal and vertical applications
The compact and robust linear stage is easy to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It convinces with an optimal price-performance ratio with tested exceptionally high durability. For this reason, this linear stage is favored for large and small series.The robust, very stable base structure, ground to highest flatness, allows excellent overrun values and enormous stiffness for maximum resolutions.It has a special motor with minimum outgassing values and for use under elevated temperatures. In addition, it has a compact, non-contact switching PCB switch for the end position, outgassed to 10E-8mBar.
Optinally, an individual special configuration for increased clean room conditions and for use in biotechnology, medical technology, food industry and pharmaceutical technology is possible.
Fields of application
Focusing of sensors or optics, setup of scanning applications, camera axes for medical devices, transport systems for pharmaceuticals, dispensing applications and bonding technology, laboratory microscopy, handling systems, laboratory automation, setup of multi-axis systems, positioning system, 3D printing, research and development
|Travel||[mm]||25, expandable to 50|
|Repeatability unidirectional||[µm]||± 1.6|
|Repeatability bidirectional||[µm]||± 2.1|
|Max. load Fx||[N]||40|
|Max. load Fz||[N]||40|
|Vacuum||[mbar]||up to 10-8 HV/UHV|
|Lubrication liquid||[mbar]||up to 10-8|
|Max. bakeout temperature||[deg]||100|
|Guide||Stainless steel, profile rail|
|Feedback||Open Loop, optional with linar scale|
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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