Vacuum linear stages and axes


Compact focus linear stage

HV / UHV, 25 mm travel, 1.6 µm repeatability, 4 kg load

  • Vacuum: all ranges HV / UHV up to  10-8 mbar
  • Lubrication liquid up to 10-8
  • Max. Bakeout temperature: 100°C
  • Magnetic Version

Optionally configurable:

  • Extendable travels up to 50 mm
  • Optionally with linear scale for repeatability up to 0.3 µm as well as position feedback and monitoring
  • Nickel-plated aluminum parts for increased hygiene requirements in medical technology and the pharmaceutical industry on request
  • Special lubrication for clean room, vacuum, pharma or food industry
  • Optional with controller FMC220 or FMC400/450


Easy to integrate for horizontal and vertical applications

The compact and robust linear stage is easy to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It convinces with an optimal price-performance ratio with tested exceptionally high durability. For this reason, this linear stage is favored for large and small series.The robust, very stable base structure, ground to highest flatness, allows excellent overrun values and enormous stiffness for maximum resolutions.It has a special motor with minimum outgassing values and for use under elevated temperatures. In addition, it has a compact, non-contact switching PCB switch for the end position, outgassed to 10E-8mBar.

Optinally, an individual special configuration for increased clean room conditions and for use in biotechnology, medical technology, food industry and pharmaceutical technology is possible.


Fields of application

Focusing of sensors or optics, setup of scanning applications, camera axes for medical devices, transport systems for pharmaceuticals, dispensing applications and bonding technology, laboratory microscopy, handling systems, laboratory automation, setup of multi-axis systems, positioning system, 3D printing, research and development

Travel[mm] 25, expandable to 50
Repeatability unidirectional[µm]± 1.6
Repeatability bidirectional[µm]± 2.1
Positioning speed[mm/s]30
Max. load Fx[N]40
Max. load Fz[N]40
Vacuum[mbar]up to 10-8  HV/UHV
Lubrication liquid [mbar]up to 10-8
Max. bakeout temperature[deg]100
Magnetism Versionsmagnetic
MotorStepper Motor
GuideStainless steel, profile rail
FeedbackOpen Loop, optional with linar scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0