2LA95-LA105 (OSA)
Vacuum / Cleanroom Multi Axes Systems



XYZ-System mit Piezobremse (UHV)

Three coordinate manipulator with stroke of 5 x 20 x 10 mm and loads up to 2 kg. Dry running, piezo brake, lead screw, stepper motor. Includes measuring system for feedback of the actual position. It is ideally designed for applications in optics under laboratory conditions in a vacuum ranges up to 10E-9 mbar.


782475:004.26 XYZ
Standard System LA95LA95LA105
Travel[mm] 10520
Positioning speed[mm/s]251025
Max. Speed[mm/s]502050


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0