MT130-SM (ISO 5)
Miniature Linear stages

Linear Stage 130 × 155 × 43 mm (Cleanroom ISO 5), Travel 50 mm, Rep ±2.3 µm, Load 4.5 kg, Speed 40 mm/s
MT130-SM (ISO 5)

 

EUV Miniature Linear Stage

  • EUV-compatible; cleanroom class up to ISO 5
  • Repeatability up to 2.3 µm
  • Permanent magnet brake
Options:
  • Stackable to form a compact 3-axis positioning system: MP130-3
  • Combinable with the DT130 rotary stage
  • Travel ranges up to 80 mm on request
  • High-resolution measurement system
  • Customized EUV lubrication, nickel coatings, PTFE & KEPLA®, fluorinated lubricants, Dicronite® / dry-film coatings
  • Tailored development including 3D design, prototypes, and series production


Application Fields

Positioning in confined spaces within EUV cleanroom environments, e.g. cameras, microscopes, and sensors (AFM, WLI), construction of space-saving XYZ multi-axis systems, manipulators for industrial and research applications, compact cleanroom positioning systems, wafer inspection, wafer prober alignment

 

MT130 (782327:084.26)   -50-SM
Travel [mm] 50
Repeatability unidirectional [μm] ± 2.3
Repeatability bidirectional [μm] ± 4.3
Positioning speed [mm/s] 20
Max. speed [mm/s] 40
Max. load Fx [N] 45
Max. load Fy [N] 95
Max. load Fz [N] 95
Length [mm] 155
Width [mm] 130
Height [mm] 43
Weight [kg] 2.2
Drive   Ball screw drive 1214.563/2.8.78.115 P3P (ISO 5)
Lead   2
Bearing   Cross roller bearing stainless steel, hybrid, optional full ceramic
Motor   Stepper motor
Feedback   Open loop
Optional features   Travels up to 80 mm on request, high-resolution linear scale, custom EUV lubrication, nickel coatings, PTFE & KEPLA®, fluorinated lubricants, Dicronite® / dry-film coatings, lead screw with dry lubrication, adapter, bore grid, cable / plugs
Versions for cleanroom  Up to cleanroom class ISO 5 (higher on request)
Versions for beam   UV, DUV, EUV (X-ray, gamma on request)
Versions with lower magnetism Magnetic
Versions for vacuum    On request

 

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Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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