Nearly all miniature linear stages shown here are optionally available in a non-anodized version and with UHV-compatible lubrication for residual pressures down to 10E-6 mbar. In this configuration, they achieve at least cleanroom class ISO 6 – or better – making them suitable for sensitive environments.

For more demanding operating conditions, such as cleanroom class ISO 4 – 2, vacuum down to 10E-11 mbar, or harsh radiation environments, specially designed stage variants are available:

Overview Cleanroom & Vacuum Linear Stages     Contact Technical Consulting

Materials

Steinmeyer Mechatronik GmbH predominantly uses aluminum for the structure of multi-axis positioning systems.
In special cases, steel and titanium (e.g., for non-magnetic systems) are also possible.

The reason: aluminum efficiently dissipates localized heat, allowing the system to quickly reach a thermally stabilized state—an essential prerequisite for stable and highly accurate positioning systems.

The lower stiffness of aluminum compared to steel is compensated for by design measures, such as:

• a slightly increased table height
• the use of hollow profiles

Important: An aluminum beam and a steel beam with identical geometry exhibit the same deflection under their own weight. For special requirements—e.g., non-magnetic applications—titanium versions are also available.

Functional surfaces and coatings

In addition to standard surfaces, numerous customer-specific surface and coating concepts are available.
These are specifically designed to achieve very high cleanroom classes—up to ISO 1–2, depending on the application and process.

To meet demanding process requirements, we develop and qualify application-specific functional coatings, including:

• Nickel coatings
• PTFE & KEPLA® coatings
• Fluorinated lubricants
• Dicronite® / dry-film coatings
• Application-specific coating combinations

In addition, the following options are available:

• anodized (cleaned)
• alternative color anodizing
• bare aluminum, cleaned
• Bilatal
• Nickel

These surfaces are suitable, for example, for high purity requirements, chemical resistance (life science), or process-critical environments.

Why functional coatings are crucial (before → after)

• Standard surface → EUV-compatible surface
• Reflective → non-reflective, minimized stray light
• Limited sliding capability → maximum sliding performance & reduced wear
• Basic protection → chemical & corrosive resistance
• One-size-fits-all → cost-optimized, application-specific performance

Special surfaces are often required for UV / DUV / EUV applications (X-ray or gamma applications on request).

Due to their low installation height and precise guide mechanism, multiple axes can be mounted directly on top of each other. This enables highly compact XYZ positioning systems with a minimal footprint. It is essential that the maximum force in the drive direction is not exceeded. The force for vertical positioning is specified in the linear stage specifications under Fx.

Advantages of the XYZ stacked design:

• Very low overall system height
• Modular expandability
• High positioning accuracy
• Flexible combination of different travel ranges

Examples of stacked miniature systems can be found here:

XYZ Stacked Multi-Axis Systems

Parallel kinematic setups with stacked miniature linear stages

Parallel kinematic systems based on miniature linear stages combine the advantages of parallel kinematics and stacked architectures in a single design:

• Multiple degrees of freedom
• Short travel ranges
• Highest precision
• Confined installation space

Such configurations, in combination with XY stages or rotary tables, are frequently implemented as parallel kinematic structures and represent a cost-efficient alternative to hexapods—particularly for active alignment applications in optics and photonics. In combination with compact rotary stages, highly space-saving XYZ-R systems can be realized.

Further information on optical active alignment and additional system configurations can be found here:
Active Alignment XY Theta Systems XYZ Tip-Tilt Systems

Für Miniatur-Stages bietet Steinmeyer Standard-Motion-Controller, PLC-Integration sowie kundenspezifische Embedded-Lösungen. Je nach Einbausituation kann die Steuerung platzsparend extern im Schaltschrank oder vollständig integriert direkt im Miniatur-System realisiert werden.

Overview Motion Controllers & Control Concepts

System Architecture – Optimized for Compact Designs

Control solutions for miniature stages are selected application-specifically and precisely matched to drive concept, encoder system, and installation constraints. Particular focus is placed on minimal footprint, thermal stability, and cable management.

Standard Motion Controllers

• Suitable for single-axis or stacked multi-axis miniature systems
• Configurable control loops (position / velocity / torque)
• Fieldbus interfaces (e.g., EtherCAT, PROFINET)
• Fast commissioning and parameterization

Typical application: Compact precision axes with ball screw, stepper motor, or linear motor drives.

PLC Integration

• Integration into existing machine control environments
• Centralized system logic via customer PLC
• Reduced integration effort for OEM applications
• Standardized industrial communication protocols

Typical application: Space-constrained automation systems and modular machine platforms.

Custom Embedded Solutions

• Highly compact, application-specific controllers
• Integrated power stages for reduced cabling effort
• Optimized for minimal installation space
• Adapted to cleanroom, vacuum, or optical alignment environments

Typical application: Highly integrated miniature positioning systems with strict space or environmental requirements.