KT600-EDLM
XY Stages

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s
KT600-EDLM

 

Precision giant with the highest repeatability

This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.

Fastest scanning applications with high acceleration

  • Ideal for scanning applications or high-precision positioning
  • Extremely fast scan results by a positioning speed of 330 mm/s
  • Scan high loads with an extreme resolution of 0.05 µm
  • Cost-optimized to achieve the comparable performance of air bearing systems
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
 
  • Life expectancy up to two million full strokes
 
  • integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems

 

 

Modell KT600-450-EDLM-L
Travel [mm] 450
Repeatability unidirectional [μm]± 0.2
Repeatability bidirectional [μm]± 0.3
Accuracy [μm]± 4.8
Flatness [μm]± 13
Straightness [μm]± 2.5
Positioning speed [mm/s]330
Max. speed [mm/s]500
Max. acceleration [m/s2]3
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]300
Max. torque Mx [Nm]32
Max. torque My [Nm]32
Max. torque Mz [Nm]30
Pitch [µrad]± 110
Yaw [µrad]± 110
Length [mm]600
Width [mm]600
Height [mm]110
MotorDynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
FeedbackLinearmesssystem, Linear Scale

 

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Angepasstes System für Ihr Gesamtkonzept

Your customized system

Almost all atmospheric standard stages are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages    Get in touch with our technical consultant

Ja, Lineartische können auch als Hubtische (Z-Richtung) sowie gestapelt (XY-Bewegungen verwendet werden).

Wichtig dafür ist, dass die maximale Kraft in Antriebsrichtung nicht überschritten wird. Die Kraft für die vertikale Positionierung wird in der Spezifikation bei Linear Stages unter Fx angegeben.

 

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of the Linear Stages, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

  • Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
  • Electrodynamic linear motors (ironless or iron-core).
  • Piezomotors such as Piezo-Legs® or Nanomotion®.

Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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