MT95-SM
Miniature Linear stages

Linear Stage 95 x 95 x 40 mm, Travel up to 40 mm, Rep ± 2.1 µm, Load 3 kg, Speed 11.6 mm/s

Compact positioner with internal motor

Thanks to its cross roller bearings, the MT95 miniature linear stage provides excellent straightness and flatness. The drive is redirected with a toothed belt transmission and could thus be completely accommodated in the axis.

Ideal for small installation spaces (95 x 95 x 40 mm)

Repeatability up to ± 2.1 µm

Easily stackable to compact multi-axis systems

Options:

Available with DC motor or stepper motor
3-axis compact unit: MP95-3
Version for clean room and vacuum on request

Fields of application

Positioning in small spaces e.g. incubators, fiber positioning, camera and microscope positioners, aligners for vacuum chambers, setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer prober alignment

Specifications

MT95		-40-SM
Travel	[mm]	40
Repeatability unidirectional	[μm]	± 2.1
Repeatability bidirectional	[μm]	± 4.1
Accuracy	[μm]	± 5.4
Flatness	[μm]	± 2
Straightness	[μm]	± 1.4
Positioning speed	[mm/s]	5.8
Max. speed	[mm/s]	11.6
Max. acceleration	[m/s²]	0.1
Max. load Fx	[N]	30
Max. load Fy	[N]	65
Max. load Fz	[N]	65
Max. torque Mx	[Nm]	3.2
Max. torque My	[Nm]	1.3
Max. torque Mz	[Nm]	1.1
Pitch	[µrad]	± 65
Yaw	[µrad]	± 40
Length	[mm]	95
Width	[mm]	95
Height	[mm]	40
Weight	[kg]	0.8
Screw type		Lead Screw Drive M8x0,5.8.64.84
Screw lead		0.5
Bearing		Cross Roller Bearings
Motor		Stepper Motor
Feedback		Open Loop
Material		Anodized Aluminum
Optional features		High-resolution measuring system, DC or Stepper Motor, combination to a XYZ-R system, custom adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 5 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		on request
Variants vacuum		on request