MT130-SM
Miniature Linear stages

Linear Stage 130 x 130 x 43 mm, Travel 50 - 80 mm, Rep ± 2.3 µm, Load 4.5 kg, Speed 40 mm/s
MT130-SM

 

Compact linear stage with internal motor

The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact positioning system.

  • Travels up to 80 mm in small installation spaces (130 x 130 x 43 mm)
  • Repeatability up to 2.3 µm
  • Easily stackable to compact multi-axis systems

Options:

  • Available with DC motor or stepper motor
  • 3-axis compact unit: MP130-3
  • Combinable with DT130 rotary stage
  • Stainless steel option for increased rigidity
  • Version for clean room, vacuum and EUV 

Fields of application

Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment

 

Modell MT130   -50-SM -80-SM
Travel [mm] 50 80
Repeatability unidirectional [µm] ± 2.3 ± 2.3
Repeatability bidirectional [µm] ± 4.3 ± 4.3
Accuracy [µm] ± 8.1 ± 9.7
Flatness [µm] ± 2.5 ± 4
Straightness [µm] ± 1.8 ± 2.8
Positioning speed [mm/s] 20 20
Max. speed [mm/s] 40 40
Max. acceleration [m/s2] 0.4 0.4
Max. load Fx [N] 45 45
Max. load Fy [N] 95 95
Max. load Fz [N] 95 95
Max. torque Mx [Nm] 4.6 4.6
Max. torque My [Nm] 1.8 1.8
Max. torque Mz [Nm] 1.6 1.6
Pitch [µrad] ± 70 ± 90
Yaw [µrad] ± 40 ± 55
Weight [kg] 1.8 2.3
Length [mm] 130 130
Width [mm] 130 130
Height [mm] 43 43
Motor   Stepper Motor Stepper Motor
Feedback   Open Loop Open Loop

 

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Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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