MT130-3-3 Miniature 6-Axis Aligner, cartesian linear motion with eucentric rotary adjustment | Travel XYZ 50 x 50 x 50 mm, Rxyz 4 x 4 x 4°.
XYZ Tip-Tilt System
782474:003.26
Highly compact 6-axis aligner
This manipulator combines the linear motions of the MP130 with three additional rotary motions of ± 2 degrees.
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Options:
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Fields of application
Highly compact alignment in 6 degrees of freedom, e.g. fiber alignment, micromachining and microassembly, in research and development, special machine construction, alignment of optical components/parts, automated wafer tests, assembly and connection techniques in silicon photonics
| MP130-3-3 | X | Y | Z | Rx | Ry | Rx | |
| Standard System | MP130-DC | MP130-DC | MP130-DC | ||||
| Travel | [mm; deg] | 50 | 50 | 50 | 4 | 4 | 4 |
| Repeatability unidirectional | [µm; deg] | ± 2.5 | ± 2.5 | ± 2.5 | ± 0.0015 | ± 0.0015 | ± 0.0015 |
| Repeatability bidirectional | [µm; deg] | ± 4.5 | ± 4.5 | ± 4.5 | ± 0.0025 | ± 0.0025 | ± 0.0025 |
| Positioning speed | [mm/s; deg/s] | 30 | 30 | 30 | 2 | 2 | 2 |
| Max. speed | [mm/s; deg/s] | 60 | 60 | 60 | 4 | 4 | 4 |
| Max. load | [N] | 5 | 5 | 5 | |||
| Length x width x height | [mm] | 288 x 180 x 185 | |||||
| Weight | [kg] | 15 | |||||
| Drive | Ball Screw 1214.527/2.8.78.103 P3P, Belt | Eccentric | |||||
| Lead | 2 mm | ||||||
| Bearing | Cross Roller Bearing | ||||||
| Motor | DC Motor | ||||||
| Feedback | Motor Encoder | ||||||
| Material | Anodized Aluminum | ||||||
| Optional features | optional with stepper motor (repeatability unidirectional ± 2.3 µm / bidirectional ± 4.3 µm), sample holder, rotary stage, custom adapter, bore grid, cable / plugs | ||||||
| Variants cleanroom | up to clean room class ISO 6 (higher on request) | ||||||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||||||
| Variants Magnetism | magnetic (low-magnetic on request) | ||||||
| Variants vacuum | up to 10E-6 mbar (higher on request) | ||||||
Used Standard Components
MT130-DC
KGT 1214
Related Products
Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:
Overview Clean Room & Vacuum Stages Get in touch with our technical consultant
Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.
What surfaces are available?
Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).
Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:
- Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
- Electrodynamic linear motors (ironless or iron-core).
- Piezomotors such as Piezo-Legs® or Nanomotion®.
Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Katja Weißbach
Consulting
T +49 351 88585-64
E-Mail
Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail
Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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