XZ-Phi system | X linear motor, ball screw | Z DC motor, cross roller | Phi torque motor
Combinations of laboratory axes


High-precision measuring system with liner axis and rotary stages

This X-Z-Phi multi-axis positioning system consists of high-precision and durable standard axes (PMT160-300-EDLM, MT130-50-DC, DT170-TQ), which can be ideally combined for a high-precision measurement setup. For horizontal movements, the PMT160-300-EDLM enables the smallest step sizes in the sub-micrometer range in addition to high positioning speeds. To exploit the full accuracy of the linear scale, it lies in alignment with the distance to be measured (Abbé's comparator principle). The scale sits separately from the table radially in front of the rotary table at the height of the part to be measured.


Highly precise and reliable metrology

  • Ideal for setting up your high-precision metrology systems
  • Measuring system resolutions in the submicrometer range up to 0.1 µm / 0.0001°
  • High precision repeatability up to 0.3 µm
  • Finest rotational movements up to 0.001°
  • Low maintenance with extremely long service life
Flexibly configurable:
  • Different motor variants: DC motor, stepper motor, linear motor and nanomotion
  • Immediate use with pre-configured controller incl. exemplary software
  • Versions for clean room ISO 14644-1

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


Fields of application

Analytical instruments, particle analysis, layer measurements, laboratory test systems, surface measurements, characterization of samples, measurements in the micrometer and nanometer range, sample preparation, rotatory and linear measurement technology for small samples, quality inspection




Phi (Rz)

Used standard componentPMT160-DCMT130-DCDT165-TQ


[mm; deg]




Repeatability unidirectional

[µm; deg]

± 0.3

± 2.5

± 0.005

Repeatability bidirectional

[µm; deg]

± 0.4

± 4.5

± 0.001

Positioning Speed

[mm/s; deg/s]



Max. Load







Ironless Dynamic Linear Motor



Torque Motor


Drive Ball Screw


Linear Scale

Linear Scale

Angular Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

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Are you looking for the best technical solution? Get in touch with us:

Nadine Strudel

+49 351 88585-44