DT230-SM
Vacuum / Cleanroom rotary stages

782475:012.14 (DT230-SM)

High-resolution, stable aperture rotary stage

UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0002°, speed 180°/s, load 15 kg

Cleanroom: variants up to class ISO 6 (higher on request))

Beam: UV, DUV, EUV (X-ray, gamma on request)

Vacuum: all ranges HV / UHV up to 10^-11 mbar

Lubrication: liquid up to 10^-8 mbar / dry up to 10^-11 mbar

Max. Bake-out temperature: 120°C

Options:

Available as magnetic, low-magnetic, magnet-free version
Material selection and lubrication adapted to the application
Version for cleanroom, laboratory or production
Optional with FMC400/450 controller or PLC connection
Customer-specific development with 3D design, prototypes, series production

Fields of application

High-resolution, outstanding stable inspection / microscopy, e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, transmitted light measurements in semiconductor technology, wafer inspection, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, materials research, materials analysis

Specifications

DT230		-SM-W
Travel	[deg]	n x 360
Repeatability unidirectional	[deg]	± 0.0002
Repeatability bidirectional	[deg]	± 0.0003
Positioning speed	[deg/s]	90
Max. speed	[deg/s]	180
Max. load Fz	[N]	150
Length	[mm]	250
Width	[mm]	230
Height	[mm]	100
Turntable	[mm]	Ø 200
Aperture (without insert)	[mm]	Ø 125
Aperture (with insert)	[mm]	Ø 25
Weight	[kg]	13.1
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Stepper Motor
Bearing		Ball Bearing sainless steel, hybrid, optional full ceramic
Feedback		Angular Scale
Resolution Measuring system		0.00002°
Optional features		with / without aperture, high load, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV