DT105-NM
Vacuum / Cleanroom rotary stages

782326:024.24, 782326:037.24
DT105-NM - Vacuum / Cleanroom rotary stages

 

High-resolution rotary stage with aperture

HV / UHV, DUV, cleanroom ISO 6, n x 360°, rep 0.0005°, 3 kg load, speed 270°/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / special configuration dry up to 10-11 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Available in magnetic and low magnetic versions (magnet-free as a special configuration)
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

High-resolution imaging under limited installation space

This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. The 36 mm transmitted light allows precise positioning, measurement and analysis of small samples. It can be combined into demanding multi-axis systems and is easily controlled by our FMC 400/450 controllers.
 

Fields of application

High precision and dynamic microscopy e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, material research, material analysis

 

DT105 -1NM-W-2NM-W
Travel[mm]n x 360n x 360
Repeatability unidirectional[μm]± 0.0005± 0.0005
Repeatability bidirectional[μm]± 0.001± 0.001
Positioning speed[mm/s]180180
Max. speed[mm/s]270270
Max. load Fz[N]1030
Max. load torque Mz[Nm]0.40.8
Length[mm]150150
Width[mm]105105
Height[mm]3232
Weight[kg]1.31.3
Turntable[mm]Ø 150Ø 150
Aperture[mm]Ø 36Ø 36
Lubrication liquid[mbar]up to 10-8up to 10-8
Lubrication dry (Special configuration)[mbar]up to 10-11up to 10-11
Max. Bakeout temperature[deg]100100
Motor 1 Nanomotion (Piezo)2 Nanomotion (Piezo)
Bearing stainless steel
Feedback angular scale
Resolution Measuring system0.00005° 
Optional features Four-point contact ball bearings for liquid lube, equipment with up to 4 motors for higher loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetismmagnetic, low-magnetic (magnet-free on request)
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
E-mail