DT200
Vacuum / Cleanroom rotary stages

782338:033.26
DT200 - Vacuum / Cleanroom rotary stages

 

Aperture rotary stage

HV, DUV / EUV, cleanroom ISO 5, n x 360°, rep ± 0.001°, speed 109°/s, load 11 kg

  • Cleanroom: variants up to class ISO 5 (higher on request)
  • Beam: UV, DUV, EUV (X-ray, gamma on request)
  • Lubrication: liquid up to 10-6 mbar
Options:
  • With or without aperture
  • Different motors: DC motor, stepper motor, AC servo
  • High-resolution optical Angular scale
  • Integrated rotary joint
  • Material selection adapted to the application: Aluminum, Bilatal, Nickel
  • Adaptation of sample size 12” / 300 mm to customer-specific chuck interface
  • Design for cleanroom, laboratory or production
  • Optional with controller FMC400/450, customer-specific interfaces (DLL, API), a ready-to-use motion controller with sample software or integration into PLC architectures or ACS environments
  • Custom development with 3D design, prototypes, series production

Fields of application

Reflective surface inspection, transmitted light measurement, wafer alignment under reflection, transparent substrate inspection, glass wafer evaluation, thin-film thickness measurement, defect detection in reflective layers, wafer inspection, mask alignment, lens alignment, beam steering, fiber coupling, optical metrology, wafer bonding, die placement, mirror positioning, spectroscopy alignment, photolithography stages, polarization rotation

 

782338:033.26   -DC-R -DC-R-W
Travel [deg] n x 360 n x 360
Repeatability unidirectional [deg] ± 0.002 ± 0.001
Repeatability bidirectional [deg] ± 0.014 ± 0.002
Accuracy [deg] ± 0.017 ± 0.003
Excentric runout [µm] ± 4 ± 4
Wobble [µrad] ± 25 ± 25
Positioning speed [deg/s] 73 47
Max. Speed [deg/s] 109 70
Max. acceleration [deg/s2] 1234 790
Max. load Fz [N] 110 110
Max. torque Mx, My [N] 16.6 16.6
Max. torque Mz [N] 5.6 8.8
Length [mm] 240 240
Width [mm] 200 200
Height [mm] 40 40
Turntable [Ø] 170 170
Aperture [Ø] 66 66
Weight [kg] 4.0 4.0
Bearing   Thin-section bearing
Motor   DC Motor
Transmission   Belt, Harmonic Drive
Feedback   Motor Encoder, Dual loop: Angular Scale
Surface Coating   Anodized Aluminum, Nickel
Optional Features   Electrical and pneumatic rotary feed-through,
superfinished turntable for optimum axial run-out, brake,
rotation limiter, cable routing, reversing hard stop, sealing air, extraction system
Versions for Cleanroom   Clean Room Class ISO 5 (higher on request)
Versions for Radiation   EUV, DEV, UV (X-ray and gamma on request)
Versions with Lower Magnetism   -
Versions for Vacuum   -

 

 

 

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Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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