DT130
Vacuum / Cleanroom rotary stages

782328:025.26 (with PEEK worm drive)
DT130 - Vacuum / Cleanroom rotary stages

 

Self-locking rotary stage

HV 10E-8 mbar, DUV, ISO 4 | Travel n × 360° | Repro ± 0.003° | Load 4.8 kg | Speed 40°/s

  • Cleanroom: versions up to ISO class 4 (higher on request)
  • Radiation: UV, DUV (EUV, X-ray, and gamma on request)
  • Vacuum: high vacuum up to 10-8 mbar (higher on request)
  • Lubrication: liquid up to 10-8 mbar
Options:
  • With or without aperture
  • Customer-specific fluorine-free / PFAS-free UHV lubrication, adapters, hole patterns, cables / connectors
  • Custom development including 3D design, prototypes, and series production


High resolution and precision

The DT130 rotary stage is designed for precise positioning of low loads. The worm gear drive guarantees very high self-locking forces in the desired position and, thanks to the high resolution, enables excellent repeatability.
 

Fields of application

High-precision metrology and calibration tasks, semiconductor inspection, wafer handling, optical alignment and angular positioning, research and development setups, microscopy and inspection systems, precise sample rotation at low loads, multi-axis positioning systems

 

782328:025.26 (with PEEK worm drive)   -SM
Travel [deg] n × 360
Repeatability unidirectional [deg] ± 0.003
Repeatability bidirectional [deg] ± 0.007
Positioning accuracy [deg] ± 0.007
Positioning speed [deg/s] 27
Max. speed [deg/s] 40
Max. load Fz [N] 47
Max. load torque Mx, My [Nm] 0.5
Length [mm] 200
Width [mm] 130
Height [mm] 45
Turntable Ø [mm] 100
Aperture Ø [mm] 25
Weight [kg] 2.0
Lubrication liquid [mbar] 10E-8
Max. bakeout temperature [deg] 120
Bearing   Precision ball bearing
Motor   Stepper motor
Drive   Worm drive
Feedback   Motor encoder
Surface   Anodized aluminum, nickel, plain
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cables / connectors
Variants cleanroom   up to cleanroom class ISO 4 (higher on request)
Beam variants   UV, DUV (EUV, X-ray and gamma on request)
Variants magnetism   magnetic (low-magnetic on request)
Variants vacuum   up to 10-8 mbar high vacuum (higher on request)

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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