LA95
Vacuum / Cleanroom linear stages and axes

782475:055.26 (40); 782475:054.26 (80), 782475:016.26 (185) - with gear box
LA95 - Vacuum / Cleanroom linear stages and axes

 

Precision linear stage

HV 10E-9 mbar, EUV, ISO 4 | Travel 10 – 185 mm | Rep 0.4 µm | Load 4.5 kg | Speed 8.4 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vakuum: all ranges HV, lubrication liquid up to 10-8 mbar / dry up to 10-9 mbar
  • Max. bakeout temperature: 120°C
Options:
  • With or without measuring system
  • With or without gear box (picture without gear box)
  • Design for clean room, vacuum and radiation
  • Lead screw with dry lub ball screw with liquid lub
  • Combinable with the XYZ system 3LA95 (OSA) or with rotary stages
  • Custom development with 3D design, prototypes, series production
  • Optional with FMC400/450 controller


Fields of application

Positioning for scanning applications, micro-assembly, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, positioning system for laboratory inspection

 

LA95   -40-SM -40-SM-L -80-SM -80-SM-L -185-SM -185-SM-L
Travel [mm] 40 40 80 80 185 185
Repeatability unidirectional [μm] ± 1.9 ± 0.4 ± 1.9 ± 0.4 ± 1.9 ± 0.4
Repeatability bidirectional [μm] ± 2.9 ± 0.5 ± 2.9 ± 0.5 ± 2.9 ± 0.5
Positioning speed [mm/s] 4.2 4.2 4.2 4.2 4.2 4.2
Max. speed [mm/s] 8.4 8.4 8.4 8.4 8.4 8.4
Max. load Fx [N] 45 45 45 45 45 45
Max. load Fy [N] 40 40 40 40 40 40
Max. load Fz [N] 40 40 40 40 40 40
Length (with gear box) [mm] 260 260 285 285 410 410
Length (without gear box) [mm] 235 235 260 260 385  
Width [mm] 105 105 105 105 95 95
Height [mm] 50 50 50 50 55 55
Weight [kg] 2.6 2.6     4.5 4.5
Max. Bakeout temperature [deg] 120
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-9
Drive   Lead Screw TR8x1.5
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop Linear Scale Open Loop Linear Scale Open Loop Linear Scale
Resolution Measuring system     0.1 µm, optional up to 0.01 µm   0.1 µm, optional up to 0.01 µm   0.1 µm, optional up to 0.01 µm
Optional features   Gear box, lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    all ranges up to 10E-9 mbar HV       

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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