LA95
Vacuum / Cleanroom linear stages and axes
782475:055.26 (40); 782475:054.26 (80), 782475:016.26 (185)
Precision linear stage
HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg, Speed 8.4 mm/s
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Options:
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Fields of application
Positioning for scanning applications, micro-assembly, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, positioning system for laboratory inspection
| LA95 | -40-SM | -40-SM-L | -80-SM | -80-SM-L | -185-SM | -185-SM-L | |
| Travel | [mm] | 40 | 40 | 80 | 80 | 185 | 185 |
| Repeatability unidirectional | [μm] | ± 1.9 | ± 0.4 | ± 1.9 | ± 0.4 | ± 1.9 | ± 0.4 |
| Repeatability bidirectional | [μm] | ± 2.9 | ± 0.5 | ± 2.9 | ± 0.5 | ± 2.9 | ± 0.5 |
| Positioning speed | [mm/s] | 4.2 | 4.2 | 4.2 | 4.2 | 4.2 | 4.2 |
| Max. speed | [mm/s] | 8.4 | 8.4 | 8.4 | 8.4 | 8.4 | 8.4 |
| Max. load Fx | [N] | 45 | 45 | 45 | 45 | 45 | 45 |
| Max. load Fy | [N] | 40 | 40 | 40 | 40 | 40 | 40 |
| Max. load Fz | [N] | 40 | 40 | 40 | 40 | 40 | 40 |
| Length | [mm] | 260 | 260 | 285 | 410 | 410 | |
| Width | [mm] | 105 | 105 | 105 | 95 | 95 | |
| Height | [mm] | 50 | 50 | 50 | 55 | 55 | |
| Weight | [kg] | 2.6 | 2.6 | 4.5 | 4.5 | ||
| Max. Bakeout temperature | [deg] | 120 | 80 | 120 | 80 | 120 | 80 |
| Lubrication liquid | [mbar] | up to 10-8 | |||||
| Lubrication dry | [mbar] | up to 10-9 | |||||
| Motor | Stepper Motor | ||||||
| Bearing | cross roller bearings stainless steel, hybrid | ||||||
| Feedback | Open Loop | Linear Scale | Open Loop | Linear Scale | Open Loop | Linear Scale | |
| Resolution Measuring system | 0.1 µm, optional up to 0.001 µm | 0.1 µm, optional up to 0.001 µm | 0.1 µm, optional up to 0.001 µm | ||||
| Optional features | lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||||||
| Variants clean room | up to clean room class ISO 4 (higher on request) | ||||||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||||||
| Variants Magnetism | magnetic | ||||||
| Variants vacuum | all ranges up to 10E-9 mbar HV / UHV | ||||||
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