Vacuum / Cleanroom linear stages and axes

782475:055.26 (40); 782475:054.26 (80), 782475:016.26 (185)
LA95 - Vacuum / Cleanroom linear stages and axes


Precision linear stage

HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg, Speed 8.4 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vakuum: all ranges HV / UHV
  • Lubrication liquid up to 10-8 mbar / dry up to 10-9 mbar
  • Max. bakeout temperature: 120°C
  • With or without measuring system
  • Design for clean room, vacuum and radiation
  • Lead screw with dry lub ball screw with liquid lub
  • Combinable with the XYZ system 3LA95 (OSA) or with rotary stages
  • Custom development with 3D design, prototypes, series production
  • Optional with FMC400/450 controller

Fields of application

Positioning for scanning applications, micro-assembly, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, positioning system for laboratory inspection


LA95 -40-SM-40-SM-L-80-SM-80-SM-L-185-SM-185-SM-L
Repeatability unidirectional[μm]± 1.9± 0.4± 1.9± 0.4± 1.9± 0.4
Repeatability bidirectional[μm]± 2.9± 0.5± 2.9± 0.5± 2.9± 0.5
Positioning speed[mm/s]
Max. speed[mm/s]
Max. load Fx[N]454545454545
Max. load Fy[N]404040404040
Max. load Fz[N]404040404040
Length[mm]260260285 410410
Width[mm]105105105 9595
Height[mm]505050 5555
Weight[kg]2.62.6  4.54.5
Max. Bakeout temperature[deg]120801208012080
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-9
Motor Stepper Motor
Bearing cross roller bearings stainless steel, hybrid
Feedback Open LoopLinear ScaleOpen LoopLinear ScaleOpen LoopLinear Scale
Resolution Measuring system  0.1 µm, optional up to 0.001 µm 0.1 µm, optional up to 0.001 µm 0.1 µm, optional up to 0.001 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism magnetic
Variants vacuum  all ranges up to 10E-9 mbar HV / UHV   


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0