LA92
Vacuum / Cleanroom linear stages and axes

782475:037.26, 782475:028.26
LA92 - Vacuum / Cleanroom linear stages and axes

 

High Speed Linear Axis

HV / UHV / EUV, ISO 4, 40 mm travel, 0.4 µm repeatability, up to 2 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all areas HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • Magnetic, low-magnetic and magnet-free versions available
  • Material selection and vacuum lubrication adapted to the application
  • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

Fast horizontal and vertical positioning in UHV

The linear axis is mainly used for scanning samples. It allows fast positioning with extremely high resolution in ultra-high vacuum, also in vertical direction. It has a very narrow design with internal motors.

Application areas

High resolution and fast scanning applications, micro assembly, semiconductor technology in ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection.

 

LA92   -40-LM-L  
Travel [mm] 40  
Repeatability unidirectional [μm] ± 0.3  
Repeatability bidirectional [μm] ± 0.4  
Positioning speed [mm/s] 100  
Max. speed [mm/s] 150  
Max. load Fx [N] 19  
Max. load Fy [N] 19  
Max. load Fz [N] 9  
Length [mm] 205  
Width [mm] 92  
Height [mm] 32  
Lubrication liquid [mbar] up to 10-8  
Lubrication dry [mbar] up to 10-11  
Max. Bakeout temperature [deg] 120  
Motor   Nanomotion  
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback   Linear Scale  
Resolution Measuring system 0.1 µm, optionally up to 0.005 µm
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10-11 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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