Vacuum / Cleanroom linear stages and axes

782475:037.26, 782475:028.26
LA92 - Vacuum / Cleanroom linear stages and axes


High Speed Linear Axis

HV / UHV / EUV, ISO 4, 40 mm travel, 0.4 µm repeatability, up to 2 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all areas HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • Magnetic, low-magnetic and magnet-free versions available
  • Material selection and vacuum lubrication adapted to the application
  • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

Fast horizontal and vertical positioning in UHV

The linear axis is mainly used for scanning samples. It allows fast positioning with extremely high resolution in ultra-high vacuum, also in vertical direction. It has a very narrow design with internal motors.

Application areas

High resolution and fast scanning applications, micro assembly, semiconductor technology in ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection.


LA92 -40-LM-L 
Repeatability unidirectional[μm]± 0.3 
Repeatability bidirectional[μm]± 0.4 
Positioning speed[mm/s]100 
Max. speed[mm/s]150 
Max. load Fx[N]19 
Max. load Fy[N]19 
Max. load Fz[N]9 
Lubrication liquid[mbar]up to 10-8 
Lubrication dry[mbar]up to 10-11 
Max. Bakeout temperature[deg]120 
Motor Nanomotion 
Bearing cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback Linear Scale 
Resolution Measuring system0.1 µm, optionally up to 0.005 µm
Optional features custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 4 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetismmagnetic, low-magnetic, magnet-free
Variants vacuum  all ranges up to 10-11 mbar HV / UHV


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0