Vacuum / Cleanroom linear stages and axes

782447:010.26 (25)
LA85 - Vacuum / Cleanroom linear stages and axes


Focus linear stage

HV / DUV, cleanroom ISO 6, travel 25 - 50 mm, rep 1.6 µm, speed 60 mm/s, load 4 kg

  • Vacuum: all ranges HV up to  10-8 mbar
  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Lubrication liquid up to 10-8 mbar
  • Max. Bakeout temperature: 100°C

Optionally configurable:

  • Optionally with linear scale for repeatability up to 0.3 µm as well as position feedback and monitoring
  • Nickel-plated aluminum parts for increased hygiene requirements in medical technology and the pharmaceutical industry on request
  • Special lubrication for clean room, vacuum, pharma or food industry
  • Customized development with 3D design, prototypes, series production

Easy to integrate for horizontal and vertical applications

The compact and robust linear stage is easy to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It convinces with an optimal price-performance ratio with tested exceptionally high durability. For this reason, this linear stage is favored for large and small series.The robust, very stable base structure, ground to highest flatness, allows excellent overrun values and enormous stiffness for maximum resolutions.It has a special motor with minimum outgassing values and for use under elevated temperatures. In addition, it has a compact, non-contact switching PCB switch for the end position, outgassed to 10E-8mBar.

Optinally, an individual special configuration for increased clean room conditions and for use in biotechnology, medical technology, food industry and pharmaceutical technology is possible.

Fields of application

Focusing of sensors or optics, setup of scanning applications, camera axes for medical devices, transport systems for pharmaceuticals, dispensing applications and bonding technology, laboratory microscopy, handling systems, laboratory automation, setup of multi-axis systems, positioning system, 3D printing, research and development


LA85 -25-SM-50-SM
Repeatability unidirectional[μm]± 1.6± 1.6
Repeatability bidirectional[μm]± 2.1± 2.1
Positioning speed[mm/s]3030
Max. speed[mm/s]6060
Max. load Fx[N]4545
Max. load Fy[N]4040
Max. load Fz[N]4040
Lubrication liquid[mbar]up to 10-8
Max. Bakeout temperature[deg]100
Screw type Ball Screw 1214.555/,5R P5
Screw lead 1 
Bearing Stainless steel, profile rail
Motor Stepper Motor
Feedback Open Loop, optional with linar scale
Optional features Linear scale (his allows the actual position to be measured with a high accuracy of ± 0.3 µm and, for example, a measuring process to be triggered on-the-fly), DC or BLDC drive, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants magnetismmagnetic 
Variants vacuum  all ranges up to 10E-8 mbar HV


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67