LA170
Vacuum / Cleanroom linear stages and axes

782475:031.26; 782475:033.26
LA170 - Vacuum / Cleanroom linear stages and axes

 

High Load XYZ Linear Axis

HV 10E-9 mbar, EUV, ISO 4 | Travel 60 – 130 mm | Rep 0.5 µm | Load 20 kg | Speed 10 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: HV lubrication liquid up to 10-8 mbar / dry up to 10-9 mbar
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

High precision positioning in X, Y and Z up to 20 kg

It is used as a powerful component for multi-axis systems as well as for scanning multiple samples simultaneously. It enables highly fine positioning with high loads in ultra-high vacuum, even in vertical direction.
 

Application areas

Setup of multi-axis systems, process automation, 3D scanning, sample scanning, positioning of imaging systems, microscopy, analysis of samples, semiconductor inspection, quality assurance in biotechnology and semiconductor technology, research, beamline, accelerator, synchrotron

 

LA170   -60-SM  -60-SM-L -130-SM -130-SM-L
Travel [mm] 60 60 130 130
Repeatability unidirectional [μm] ± 2.8 ± 0.4 ± 2.8 ± 0.4
Repeatability bidirectional [μm] ± 4 ±0.5 ± 4 ± 0.5
Positioning speed [mm/s] 5 5 5 5
Max. speed [mm/s] 10 10 10 10
Max. load Fx [N] 196 196 196 196
Max. load Fy [N] 196 196 196 196
Max. load Fz [N] 196 196 196 196
Length [mm] 255 255 365 365
Width [mm] 170 170 170 170
Height [mm] 70 120 120 120
Lubrication liquid [mbar] up to 10-8      
Lubrication dry [mbar] up to 10-9      
Max. Bakeout temperature [deg] 120  
Motor   Stepper Motor  
Bearing   cross roller bearings stainless steel, hybrid  
Feedback   Linear Scale  
Resolution Measuring system   0.1 µm   0.1 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)  
Variants Magnetism magnetic      
Variants vacuum    all ranges up to 10E-9 mbar HV  

 

Your customized system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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