LA170
Vacuum / Cleanroom linear stages and axes

782475:031.26; 782475:033.26
LA170 - Vacuum / Cleanroom linear stages and axes

 

Precise high load XYZ linear axis

HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

High precision positioning in X, Y and Z up to 20 kg

It is used as a powerful component for multi-axis systems as well as for scanning multiple samples simultaneously. It enables highly fine positioning with high loads in ultra-high vacuum, even in vertical direction.
 

Application areas

Setup of multi-axis systems, process automation, 3D scanning, sample scanning, positioning of imaging systems, microscopy, analysis of samples, semiconductor inspection, quality assurance in biotechnology and semiconductor technology, research, beamline, accelerator, synchrotron

 

LA170   -60-SM  -60-SM-L -130-SM -130-SM-L
Travel [mm] 60 60 130 130
Repeatability unidirectional [μm] ± 2.8 ± 0.4 ± 2.8 ± 0.4
Repeatability bidirectional [μm] ± 4 ±0.5 ± 4 ± 0.5
Positioning speed [mm/s] 5 5 5 5
Max. speed [mm/s] 10 10 10 10
Max. load Fx [N] 196 196 196 196
Max. load Fy [N] 196 196 196 196
Max. load Fz [N] 196 196 196 196
Length [mm] 255 255 365 365
Width [mm] 170 170 170 170
Height [mm] 70 120 120 120
Lubrication liquid [mbar] up to 10-8      
Lubrication dry [mbar] up to 10-11      
Max. Bakeout temperature [deg] 120  
Motor   Stepper Motor  
Bearing   cross roller bearings stainless steel, hybrid  
Feedback   Linear Scale  
Resolution Measuring system   0.1 µm   0.1 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)  
Variants Magnetism magnetic      
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV  

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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