Vacuum / Cleanroom linear stages and axes

782475:031.26; 782475:033.26
LA170 - Vacuum / Cleanroom linear stages and axes


Precise high load XYZ linear axis

HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

High precision positioning in X, Y and Z up to 20 kg

It is used as a powerful component for multi-axis systems as well as for scanning multiple samples simultaneously. It enables highly fine positioning with high loads in ultra-high vacuum, even in vertical direction.

Application areas

Setup of multi-axis systems, process automation, 3D scanning, sample scanning, positioning of imaging systems, microscopy, analysis of samples, semiconductor inspection, quality assurance in biotechnology and semiconductor technology, research, beamline, accelerator, synchrotron


LA170 -60-SM -60-SM-L-130-SM-130-SM-L
Repeatability unidirectional[μm]± 2.8± 0.4± 2.8± 0.4
Repeatability bidirectional[μm]± 4±0.5± 4± 0.5
Positioning speed[mm/s]5555
Max. speed[mm/s]10101010
Max. load Fx[N]196196196196
Max. load Fy[N]196196196196
Max. load Fz[N]196196196196
Lubrication liquid[mbar]up to 10-8   
Lubrication dry[mbar]up to 10-11   
Max. Bakeout temperature[deg]120 
Motor Stepper Motor 
Bearing cross roller bearings stainless steel, hybrid 
Feedback Linear Scale 
Resolution Measuring system 0.1 µm 0.1 µm
Optional featureslead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request) 
Variants Magnetismmagnetic   
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV 


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0