HDT255
Vacuum / Cleanroom lifting stages

782475:013.14
HDT255 - Vacuum / Cleanroom lifting stages

 

Aperture lifting stage

UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • With or without aperture
  • Optionally with and without measuring system
  • Material selection and lubrication adapted to the application
  • Optionally with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads

The lifting stage with aperture is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Due to its lift-wedge principle, it achieves its parameters despite a low overall height of 125 mm. The combination of stepper motor and a precise ball screw, optionally sliding screw, allows smallest step sizes at comparatively high loads.
Application areas
 

Fields of application

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, alignment and inspection of wafers, probe cards and printed circuit boards, surface analysis, layer thickness measurement, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron

 

HDT255   -SM -SM-L
Travel [mm] 16 16
Repeatability unidirectional [μm] ± 2.9 ± 0.7
Repeatability bidirectional [μm] ± 4 ± 1
Positioning speed [mm/s] 8.3 8.3
Max. speed [mm/s] 16.6 16.6
Max. load Fx [N] 98 98
Max. load Fy [N] 98 98
Max. load Fz [N] 98 98
Length [mm] 410 410
Width [mm] 225 225
Height [mm] 125 125
Aperture [mm] 60 x 60
Weight [kg] 11
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop  Linear Scale
Resolution Measuring system - 0.1 µm
Optional features   With or without aperture, lead screw or ball screw, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom  up to cleanroom class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

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Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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