YZ Tracking Stage
Vacuum / Cleanroom Multi Axes Systems

782475:017.26

 

YZ System with Piezo Brake (UHV)

UHV 10E-9 mbar, EUV / X-ray, ISO 4 | Travel 7 × 7 mm | Repeatability 0.9 µm | Load 5 kg | Speed 1.8 mm/s

  • Cleanroom: versions up to ISO Class 4 (higher on request)
  • Radiation: UV, DUV, EUV, hard X-ray
  • Lubrication: liquid up to 10-8 / dry up to 10-9 mbar
  • Maximum bake-out temperature: 120°C
Optionally configurable:
  • Customer-specific fluorine-free / PFAS-free UHV lubrication
  • Adapters, mounting hole patterns, cables / connectors
  • Versions for cleanroom, vacuum, and radiation environments
  • Optional with FMC400 / FMC450 controller


Suitable under hard X-ray radiation

This 3-axis system operates dry and features a piezo brake, sliding screw drive, and stepper motor. An integrated measurement system monitors the position. The axes, based on the standard LA95 and LA105 stages, are HV / UHV compatible and designed for cleanroom environments up to ISO Class 4. This axis combination was developed as part of the “tOMography Nano crYo (OMNY)” project with the Paul Scherrer Institute (PSI). All materials are designed for use under hard X-ray radiation, offering high thermal stability, minimal outgassing, and maximum precision.

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://pubs.aip.org/aip/rsi/article/89/4/043706/362160/OMNY-A-tOMography-Nano-crYo-stage

Application Fields

X-ray tomography, X-ray diffraction, X-ray spectroscopy, EUV mask defect inspection, X-ray microscopy, transport and tracking systems in ultra-high vacuum, vacuum applications with dry lubrication, transfer systems, vacuum fine adjustment stages, EUV lithography, laboratory technology, analytical instrumentation

 

782475:017.26   Y Z
Standard System   LA95-7-SM-L-UHV LA105-7-SM-L-UHV
Travel [mm] 7 7
Repeatability, unidirectional [µm] ± 0.9 ± 7.5
Repeatability, bidirectional [µm] ± 1 ± 30
Positioning speed [mm/s] 0.9 0.9
Max. speed [mm/s] 1.8 1.8
Max. load [N] 50
Length [mm] 210
Width [mm] 105
Height [mm] 262
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-9
Max. bakeout temperature [°C] 120
Drive   Stainless steel lead screw
Motor   Stepper motor
Guide   Cross roller stainless steel, hybrid, optional full ceramic
Feedback   Linear scale
Resolution of measuring system   0.1 µm, optional up to 0.005 µm or without measuring system
Optional features   Customer-specific fluorine-free / PFAS-free UHV lubrication, adapters, hole patterns, cables / connectors
Versions for Cleanroom   up to cleanroom class ISO 4 (higher on request)
Beam variants   UV, DUV, EUV, X-ray (gamma on request)
Versions with Lower Magnetism   magnetic (low magnetic on request)
Versions for Vacuum   all ranges up to 10E-9 mbar HV / UHV

 

Your customized system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

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Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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