YZ Tracking Stage
Vacuum / Cleanroom Multi Axes Systems



YZ system with piezo brake (UHV)

This 3-axis system is dry-running, has a piezo brake as well as a lead screw and stepper motor. A measuring system is integrated for feedback of the actual position. The axes, consisting of the standard axes LA95 and LA105, are HV / UHV compatible and designed up to clean room class ISO 6.


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0