Stages and Axes


Fast, precise micropositioner

HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load

  • Vacuum: all ranges HV / UHV / EUV
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C

Optionally configurable:

  • Available as magnetic, low-magnetic and magnet-free versions
  • Different motor variants: Piezo motor or nanomotion
  • Optionally with high-resolution measuring system for repeatability up to 0.005 µm
  • Can be combined with rotary tables for rotary applications
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optionally with controller FMC400/450

Miniaturized XYZ manipulator for high precision or dynamic applications

The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.


Application areas

Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization

Travel X[mm] 50505050
Travel Y[mm] 50505050
Travel Z[mm] 50205020
Repeatability unidirectional[µm]± 0.2± 0.2± 0.4± 0.4
Repeatability bidirectional[µm]± 0.3± 0.3± 0.5± 0.5
Positioning speed[mm/s]555020
Max. load Fx[N]5555
Max. load Fy[N]5555
Max. load Fz[N]510510
FeedbackLinear ScaleLinear ScaleLinear ScaleLinear Scale
MotorPiezo MotorPiezo MotorNanomotionNanomotion
GuideCross roller Stainless steel, hybrid, optional full ceramic
Vacuum[mbar]up to 10-11  HV/UHV/EUV
Lubrication liquic[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. bakeout temperature[deg]120
Magnetism Variantsmagnetic | low-magnetic | magnet-free


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

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Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0