MP105-3
Vacuum / Cleanroom compact multi axes systems & aligner
782300:206.26
Fast, precise micropositioner
HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load
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Optionally configurable:
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Miniaturized XYZ manipulator for high precision or dynamic applications
The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.
Application areas
Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization
| MP105-3 | -50/50/30-2PM-L | -50/50/50-PM-L | 50/50/30-2LM-L | -50/50/50-LM-L | 50/50/30-2XLM-L | 50/50/30-XLM-L | |||
| Travel X | [mm] | 50 | 50 | 50 | 50 | 50 | 50 | ||
| Travel Y | [mm] | 50 | 50 | 50 | 50 | 50 | 50 | ||
| Travel Z | [mm] | 30 | 50 | 30 | 50 | 30 | 50 | ||
| Repeatability unidirectional | [µm] | ± 0.2 | ± 0.2 | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 | ||
| Repeatability bidirectional | [µm] | ± 0.3 | ± 0.3 | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 | ||
| Positioning speed | [mm/s] | 5 | 5 | 50 | 50 | 50 | 50 | ||
| Max. speed | [mm/s] | 7.5 | 7.5 | 75 | 75 | 75 | 75 | ||
| Max. load Fx | [N] | 10 | 10 | 12 | 12 | 12 | 12 | ||
| Max. load Fy | [N] | 10 | 10 | 12 | 12 | 12 | 12 | ||
| Max. load Fz | [N] | 20 | 10 | 24 | 12 | 43 | 24 | ||
| Number of motors | 2 | 1 | 2 | 1 | 2 | 1 | |||
| Motor | Piezo motor | Piezo motor | Nanomotion | ||||||
| Feedback | Linear scale | ||||||||
| Resolution measuring system | 0.1 µm, optional up to 0.005 µm or without measuring system | ||||||||
| Guide | Cross roller | ||||||||
| Length | [mm] | 155 | |||||||
| Width | [mm] | 155 | |||||||
| Height | [mm] | 195 | |||||||
| Lubrication liquid | [mbar] | up to 10-8 | |||||||
| Lubrication dry | [mbar] | up to 10-11 | |||||||
| Max. bakeout temperature | [deg] | 120 | |||||||
| Variants cleanroom | up to cleanroom class ISO 4 (higher on request) | ||||||||
| Beam variants | UV, DUV, EUV (X-ray, gamma on request) | ||||||||
| Variants magnetism | magnetic | low-magnetic | magnet-free | ||||||||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||||||||
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Overwiew standard stages Contact technical consultants
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
