XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers | Stroke 1200 x 1400 x 200 mm
Inspection and Mikroscopy

XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers | Stroke 1200 x 1400 x 200 mm - Inspection and Mikroscopy


µm-accurate positioning and nanometer stability during measurement

The gantry design enables highly dynamic movements over an area of 1,200 x 1,400 mm (adapted to the application and the available space) with a repeatability of 0.3 µm, thus guaranteeing high throughput with consistent quality. In the horizontal XY level, integrated linear motors ensure process speeds of 500 mm/s, while on the vertical Z axis the AC servo achieves values of up to 200 mm/s. The customized processing head or sensor on the Z-axis moves quickly and smoothly over the carriers on the granite. The traverse is suitable for loads up to 10 kg, while the height can vary up to 500 mm depending on the application and component height.

Variety of individual customization options

  • Ideal base for inspection systems in semiconductor or optics manufacturing
  • Very large travels of 1200 x 1400 mm
  • Highly dynamic for maximum speeds of up to 1000 mm/s
  • Integrated linear motors guarantee high accelerations and speeds with simultaneous high precision
  • High-precision and long-life drive in Z through a grinded precision ball screw
  • Easy integration or connection to automated handling systems
  • Additional casing with integrated extraction or housing for applications up to clean room class ISO 6
Optionally expandable:
  • Stackable system design
  • Adaptation of travels, length combination, cabling and motion control
  • Combination with lifting stages and/or rotary stages for the inspection of complex geometries
  • Customized interfaces available for semi-automated or highly-automated semiconductor fabs
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Immediate use with pre-configured motion controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

High-dynamic laser applications, quality inspection, metrology, process monitoring, wafer inspection, bond inspection, optical microscopy, surface measurement, microlaser joining, microlaser welding, laser micromachining, microlaser cutting


Standard SystemLA250LA250PLT240
Repeatability unidirectional  [µm]± 0.8± 0.8± 0.7
Repeatability bidirectional  [µm]± 1± 1± 1
Positioning speed[mm/s]50050050
Max. speed[mm/s]10001000100
Max. load[N]00150
Length x width x height[mm]2430 x 2260 x 1430
Max. sample dimension[mm]1200 x 1400 / GEN 5
Guide Profile RailProfile RailCross Roller Bearings
Spindle type1416/5.20.385.525 P3P (DIN 69051)
Spindle lead5
Drive Linear MotorLinear MotorServo Motor, Ball Screw
Motor Ironless Dynamic Linear MotorIronless Dynamic Linear MotorAC Servo
Feedback Linear ScaleLinear ScaleMotor Encoder


Angepasstes System für Ihr Gesamtkonzept

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:


Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0

Nadine Strudel
Consulting International

T +49 (0) 351 88585-44


Our references