Rz-X-Y-Ry-Rx | Z-R-F 8-axis positioner for inspection of optics | aperture rotary stage and aligner 45 mm | stroke 360°, 2 x 2 x 25 mm, 90°, 50 mm
XYZ Tip-Tilt System

417815.2022.W3.AB
Rz-X-Y-Ry-Rx | Z-R-F 8-axis positioner for inspection of optics | aperture rotary stage and aligner 45 mm | stroke 360°, 2 x 2 x 25 mm, 90°, 50 mm - XYZ Tip-Tilt System

 

8-axis adjustment for various inspection angles

This positioning system allows tangential scanning in 6 degrees of freedom with a very high repeatability. The sample holder, which is adjustable in focus, angle and distance, is located on an XYZ phi delta aligner with aperture, which corrects for tilt and lateral offset in 4 axes. Combined with the aperture rotary stage below, additional 360° rotations and incident and transmitted light measurements are possible. A very stiff vertical stroke support a manual angle adjustment with motorized distance adjustment for the sensor, which also operates as a focus.

Ideal for 2D transmission measurements

  • Ideal for tangential scanning with versatile adjustment options
  • Correction of tilt and lateral offset up to 0.5 µm
  • Aperture of 45 mm for the beam line
  • Air-bearing rotary stage for accuracies up to 0.0005°

Options:

  • Combinable standard stages for XYZ-Rx-Ry-Rz motions
  • Individual configuration with frame, vibration isolation, enclosure
  • Process adaptation for sensor/measuring head, sample holder
  • Version for clean room, laboratory and production
  • Wireless power and signal transmission
  • Integration into workflows via PLC or PC controller
  • Individual solution with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

 

417815.2022.W3.AB

 

Rz sample

X sample

Y sample

Rx sample

Ry sample

R sensor

F sensor

Z sensor

Standard System

 

DT250

MP200-5

MP200-5

MP200-5

MP200-5

 

PMT160-DC-L

PLT165-SM

Travel

[mm; deg]

n x 360

± 2

± 2

± 1.5

± 1.5

90

50

 100

Repeatability unidirectional

[µm; deg]

0.0005

± 0.5

± 0.5

± 1.3

± 1.3

1

± 0.3

± 3.9

Repeatability bidirectional

[µm; deg]

0.001

± 2

± 2

± 5.2

± 5.2

1

± 0.4

± 4.4

Positoning speed

[mm/s; deg/s]

700

0.5

0.5

0.4

0.4

 

30

 40
Max. speed [mm/s; deg/s] 1400 1 1 0.8 0.8   60 80

Max. load

[N]

 

 

 

 

20

 

40

 150

Motor

 

Iron Core Dynamic Linear Motor

 

Stepper Motor

Stepper Motor

Stepper Motor

Stepper Motor

 

manually

DC Motor

 

 Stepper Motor

Guide

 

Air Bearing

 

Solid State

 

Solid State

 

Solid State

 

Solid State

 

Sliding Guide

Cross Roller Bearings

 

 

Profile Rail

Drive

 

 

Gear Box, Lead Screw

Gear Box, Lead Screw

Gear Box, Lead Screw

Gear Box, Lead Screw

 

Ball Screw

 

Ball Screw

Feedback

 

Angular Scale

Open Loop

Open Loop

Open Loop

Open Loop

Scale

Linear Scale

Open Loop
Aperture [mm] Ø 45 mm
Length x width x height [mm] 600 x 600 x 880

 

Used Standard Components

PLT165-SM

High load linear stage (ball screw), travel 100 - 500 mm, rep ± 3.9 µm, load 25 kg, speed 80 mm/s

PMT160-DC

Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.7 µm, load 4,5 kg, speed 60 mm/s

PMT160-SM

Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.9 µm, load 15 kg, speed 20 mm/s

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages    Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

  • Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
  • Electrodynamic linear motors (ironless or iron-core).
  • Piezomotors such as Piezo-Legs® or Nanomotion®.

Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references