9-axis positioning system with travels up to 100 mm | XYZ DC motor, ball screw, motor encoder | Phi Theta Omega DC motor, AC servo, harmonic drive
XYZ Tip-Tilt System

782300:215.26

Automated and high-resolution imaging from every angle

This 9-axis positioning system makes it possible to view samples from all possible angles under microscopes or high-resolution cameras, such as injection nozzles, stents, small cutting tools, cannulas and other rotationally symmetrical parts. It consists of the robust and rigid standard components of the KLT310 with PMT160 for XYZ, to which different types of microscopes can be attached. The light, compact and stable KT180 XY offset stage is used for the swivel axis, with a further swivel axis with rotary axis and mounting chuck on top.

Ultra-fine details even with short process times

Ideal for the development and setup of high-precision 3D processes in medicine, biotechnology and semiconductor technology

Ultra-fine imaging of details and higher zoom levels due to stability in the µm range

Short cycle times with high speeds up to 35 mm/s

Very high repeatability of results with up to 2.5 µm and finest rotational movements up to 0.02°

Low maintenance with exceptionally long service life due to long-term reliable standard axes

Special features:

Configurable for clean room ISO 14644-1 (up to class 1 on request)
Different motor variants: DC motor, stepper motor and linear motor
Customizable for further travels and various test objects
Optional with pre-configured controller incl. exemplary software for immediate use

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of Application

Production, inspection / quality assurance of medical consumables and surgical tools (cannulas, lancets, scalpels, infusion accessories, tube connectors), alignment and inspection of optical components (lenses, prisms), production and quality control of precision components (nozzles, needles, valves)

Specifications

782300:215.26		X	Y	Z	XR	YR	Rx	Ry	Rz1	Rz2
Standard component		KLT310-DC	KLT310-DC	PLT160-DC	KT180-DC	KT180-DC	DE-H100	DE-H50	DE-H100	DE-H50
Travel	[mm; deg]	20	100	80	15	50	45	45	360	n x 360
Repeatability unidirectional	[µm; deg]	± 2.5	± 2.5	± 2.5	± 2.5	± 2.5	0.02	0.02	0.02
Repeatability bidirectional	[µm; deg]	± 2	± 2	± 2	± 2	± 2	0.01	0.01	0.01
Positoning speed	[mm/s; deg/s]	25	25	5	7	7	10	25	35	10
Max. load	[N]			80						0.5
Motor		DC-Motor	DC-Motor	DC-Motor	DC-Motor	DC-Motor	AC-Servo	AC-Servo	AC-Servo	AC-Servo
Drive		Ball Screw	Ball Screw	Ball Screw	Ball Screw	Harmonic Drive	Harmonic Drive	Harmonic Drive	Harmonic Drive	Harmonic Drive
Feedback		Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder

Controllers

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Used Standard Components

KLT310-DC

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 0.3 µm, load 28 kg, speed 60 mm/s

KT180-DC

XY microscopy stage (ball screw), travel 50 x 50 mm, rep ± 0.5 µm, load 6 kg, speed 5 mm/s

PMT160-DC

Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.7 µm, load 4,5 kg, speed 60 mm/s

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.