XY-Theta positioning system with 66 mm aperture (cleanroom ISO 6) | XY linear motor, profile rail | Theta DC Motor | Travel 200 x 250 mm x 360°
XY Theta Stage

782300:097.26

High-precision positioning for samples up to 150 mm / 6"

The system consists of two linear stages PLT240 (X and Y Axes) and a rotary stage DT53, optional DT130 (Theta Axis). Both linear stages are driven by dynamic linear motors, the rotary stage by a DC motor.

Ideal for flexible set-up and expansion of cleanroom systems

High accuracy up to 0.4 µm / 0. 004°

High accelerations and speeds up to 1000 mm/s

Outstanding low heat emission at frequent start and stop phases

Designed for maintenance-free 24/7 operation in clean room environments

Options:

Various, high-resolution measuring systems
Structure with Z-axis, traverse, frame and housing
Linear motor with temperature monitoring
Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests

Fields of application

Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology

Specifications

782300:097.26		X	Y	Rz
Standard System		PLT240-200-DLM	PLT240-250-DLM	DT58-DC-R
Travel	[mm; deg]	200	250	n x 360
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.004
Repeatability bidirectional	[µm; deg]	± 0.5	± 0.5	± 0.007
Positioning speed	[mm/s; deg/s]	530	530	100
Max. speed	[mm/s; deg/s]	1060	1060	150
Max. load	[N]	150	150	150
Weight	[kg]	60
Length x width x height	[mm]	600 x 650 x 225
Max. sample diameter		150 mm / 6" (optional larger as special version)
Guide		Profile Rail	Profile Rail
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	DC Motor
Feedback		Linear Scale	Linear Scale	Motor-Encoder
Optional features		Z-axis (e.g. PMT240) with traverse, linear motor with temperature monitoring, angular scale, adaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic

Controllers

FMC250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Used Standard Components

PLT240-DLM

High performance stage (linear motor), travel 200 - 1000 mm, rep 0.4 µm, load 15 kg, speed 1815 mm/s

DT130-DC

Selfretaining rotary stage (DC motor), travel n x 360 °, aperture ⌀ 25 mm, rep ± 0.002 °, load 4 kg, speed 40 °/s

Related Products

XY-Theta positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Theta belt, DC Motor | Travel 300 x 300 mm x 360°

XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball screw drive | Phi belt, DC motor | Travel 450 x 350 x 16 mm x 45°

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.