MP53-2-1 Miniature XY-Phi Positioning System, cartesian with Rz correction, magnet-free | XY-Rz Piezo Motor, Linear Scale
XY Theta Stage

782300:056.26

Smallest positioning increments in X and Y and rotation around Z

Phi-XY System with Piezo Motor

Small manipulator for xy movement and rotation. Linear travel is 10 mm and ± 5 degrees in rotation. Extremely high resolution in the range on nm through piezo drives. The rotation is being realized by a linear stage acting upon a rotary bearing by means of a flexible coupling.

Fixed joint for aligning parts

The three-axis system is intended for aligning parts and samples. As only small paths of a few millimetres or degrees are sufficient for such corrective movements, a rotary movement can be generated with a linear stage if it transmits its movement to an otherwise passive rotary stage by means of a solid-state joint. The advantage of such a solid-state joint is that it transfers the precision of the linear stage completely to the rotary stage. If the deflection remains below 5 degrees, the stiffness of this joint also remains sufficient to transmit movements in the nanometer range in the tensile and compressive directions.

Suitable for use in the semiconductor industry

Depending on the resolution of the measuring system installed in the table, repeat accuracies of at least 30 nm can be achieved. Please note that a measuring system with a higher resolution than the standard version specified here must be used for this. The manipulator is of particular interest in automated micro-assembly systems or for experimental set-ups in research. The manipulator is very well suited for aligning wafers in the semiconductor industry. The manipulator is also suitable for use in a vacuum and is available in a corresponding version.

Specifications

782300:056.26		X	Y	Rz
Standard System		MT53-PM	MT53-PM	MT53-PM
Travel	[mm; deg]	10	10	10
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.001
Repeatability bidirectional	[µm; deg]	± 0.7	± 0.7	± 0.002
Positioning speed	[mm/s; deg/s]	5	5	10
Max. load	[mm/s; deg/s]	10	10	20
Max. last	[N]	5	5	5
Motor		Piezo Motor	Piezo Motor	Piezo Motor
Guide		Cross Roller Bearings	Cross Roller Bearings	Cross Roller Bearings
Feedback		Linear Scale	Linear Scale	Linear Scale
Length x Width x Height	[mm]	121 x 85 x 76

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Used Standard Components

MT53-PM

Linear Stage 53 x 53 x 20 mm, Travel up to 10 mm, Rep ± 0.2 µm, Load 0.5 kg, Speed 10 mm/s

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.