MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm
XY Theta Stage

782327:001.26, 782327:002.26

Compact XYZ stage for samples up to 5"

This XYZ system allows the positioning of a sample holder for highly stable double-sided incident and transmitted light measurements. Loading and focusing is realized by vertical movement with a stroke of 25 mm. The holder is designed for round samples such as optical fibers or smaller wafers and can be adapted to various sizes and processes.

High precision at temperature fluctuations

Ideal for limited installation space and fluctuating temperatures from 0 - 40°C

Travel ranges up to 25 mm in the minimum of space

Absolute position stability, even when the motor is switched off

Consistent measurement results due to high repeatability

Optional:

Adaptation to the process: samplet, holder, feeder, sensor
Configuration for clean room ISO 14644-1 (up to class 1 on request)
Individual design with rack, vibration isolation, enclosure
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

Specifications

782327:001.26, 782327:002.26		X	Y	Z
Standard System		MT63	MT63	MT63
Travel	[mm; deg]	25	25	25
Repeatability unidirectional	[µm; deg]	± 0.8	± 0.8	± 0.8
Repeatability bidirectional	[µm; deg]	± 3.8	± 3.8	± 3.8
Positioning speed	[mm/s; deg/s]	1.8	1.8	1.8
Max. Speed	[mm/s; deg/s]	3.6	3.6	3.6
Max. load	[N]	10	11	11
Motor		DC-Motor	DC-Motor	DC-Motor
Drive		Lead Screw	Lead Screw	Lead Screw
Feedback		Linear Scale	Linear Scale	Linear Scale
Length x width x height	[mm]	206 x 259 x 137 mm

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

FMC250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Used Standard Components

MT63-DC

Linear Stage 63 x 63 x 26 mm, Travel up to 25 mm, Rep± 0.8 µm, Load 1 kg, Speed 3.6 mm/s

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.