MP53-3 Miniature XYZ Positioning System, cartesian | Piezo Motor, Linear Scale | Rep ± 0.2 µm | Travel 10 x 10 x 10 mm
Compact Multi Axis Stages

782325:110.24

High-resolution micropositioner

The MP53 positioning system is a miniaturized 3-axis system for X, Y and Z motions with travel ranges of 10 mm. The aligner is designed with piezo motors and enables positioning increments up to a few nanometres. The repeatability of +- 0.005 µm can be ensured with the linear scale.

Ideal for compact applications

Resolutions in the submicrometer range

Load capacity up to 5 N

Reliable and consistent quality by highly precise positioning

Optionally expandable:

Optionally with high-resolution measuring system for repeat accuracies up to 0.005 µm
Combinable with rotary stages for rotational applications
Variants for vacuum up to 10^-11 mbar or clean room ISO 14644-1 class 6 (up to class 1 on request)
Available as magnetic, low-magnetic and magnet-free version
Ready-to-use with preconfigured motion controller including sample software

Fields of application

Precision positioning in the smallest dimensions for laboratory applications, microscopy and semiconductor technology, sample preparation, sample scanning, camera alignment, sensor alignment, material research, material analysis

Specifications

782325:110. 24		X	Y	Z
Standard system		MT53	MT53	MT53
Travel	[mm]	10	10	10
Repeatability unidirectional	[µm]	± 0. 2	± 0.2	± 0.2
Repeatability bidirectional	[µm]	± 0.3	± 0. 3	± 0.3
Positioning speed	[mm/s]	5	5	5
Max. Load	[N]	5	5	5
Motor		Piezo Motor	Piezo Motor	Piezo Motor
Guide		Cross roller bearings	Cross roller bearings	Cross roller bearings
Feedback		Linear scale	Linear scale	Linear scale
Length x Width x Height	[mm]	90 x 55 x 60