6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360°
Compact Multi Axis Stages

786015:009.26

6-axis alignment of wafers and optics up to 12"

The 6-axis manipulator includes an XY Stage in the horizontal axis and a Tripod for vertical strokes and two tilts, which combines the strengths of cartesian and parallel kinematic designs in one system. The cartesian XY adjustment realizes travel ranges of ± 15 mm, the vertical axis of the tripod is designed for strokes of ±10 mm. The rotatory axes Rx and Ry allow tilts of ± 2°, the rotational motion around the vertical Rz is 360°.

Automated clean room inspection

Ideal for automated inspection of wafers and optics up to 300 mm / 12"

High repeatability of ± 2.5 µm or ± 0.005°

Outstanding precision, rigidity and compactness with dimensions of 520 x 600 x 155 mm

Designed for use in 3-shift operation up to clean room class ISO 5

Options:

Application-specific tested and ready for immediate use with plug-and-play motion controller incl. sample software
Special version for samples up to 450 mm / 18"
Different versions for clean room ISO 14644-1 (up to class 1 on request)
Modular multi-axes system with customized / exchangeable process heads
Various sample holders, integration into workflows
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Semiconductor inspection, alignment, wafer, optics, manipulator, parallel kinematics, testing and bonding on wafers and PCB, combinations of optical inspection and processing e.g. for chip-on-board bonding (measuring microscope and laser soldering)

Specifications

786015:009.26		X	Y	Z	Rx	Ry	Rz
Standard System		MT95	MT95	3x MT95	3x MT95	3x MT95
Travel	[mm; deg]	30	30	20	4	4	360 x n
Repeatability unidirectional	[µm; deg]	± 1.5	± 1.5	± 1.5	0.0004	0.0004	0.05
Repeatability bidirectional	[µm; deg]	± 3.5	± 3.5	± 3.5	0.001	0.001	0.1
Positioning speed	[mm/s; deg/s]	1.1	1.1	1.1	0.3	0.3	100
Max. speed	[mm/s; deg/s]	2	2	2	0.5	0.5	200
Max. load	[N]	65	65	100	65	65	20
Motor		DC-Motor	DC-Motor	DC-Motor	DC-Motor	DC-Motor	Stepper Motor
Drive		Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Belt
Feedback		Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	-
Aperture diameter	[mm]	250 (optional larger as special version)
Max. sample diameter	[mm] [inch]	300 12 (450 mm / 18" optional as special version)
Length x width x height	[mm]	520 x 600 x 155