XY system combined with lifitng stage
Combinations of industrial axes

782300:143.26

This system consists of a linear stages PLT320 (X Axis), a linear stage PLT240 (Y Axis) and a lifting stage HT240 (Z Axis).

Both linear stages are driven by dynamic linear motors, the lifting table by an AC motor.

782300:143.26		X	Y	Z
Standard System		PLT320-DLM-L	PLT240-DLM-L	HT240-AC-L
Travel	[mm]	650	300	25
Repeatability unidirectional	[µm]	± 0.4	± 0.4	± 0.7
Repeatability bidirectional	[µm]	± 0.5	± 0.5	± 1.2
Positioning speed	[mm/s]	790	530	8
Max. speed	[mm/s]	1580	1060	16
Max. load	[N]	150	150	410
Weight	[kg]	135
Length x width x height	[mm]	1160 x 710 x 320
Drive				Ball Screw
Spindle type				1412.547/1.12.145.175 P3P
Spindle lead				1
Guide		Profile Rail	Profile Rail	Profile Rail
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	AC Servo
Feedback		Linear Scale	Linear Scale	Linear Scale
Resolution Measuring system		0.1 µm standard, optionally up to 0.001 µm
Optional features		rotary stage (DT240), brake, sample holder, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic