MP105-3
Vacuum / Cleanroom compact multi axes systems & aligner
782300:206.26
Fast, precise micropositioner
HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load
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Optionally configurable:
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Miniaturized XYZ manipulator for high precision or dynamic applications
The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.
Application areas
Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization
| MP105-3 | -50/50/30-2PM-L | -50/50/50-PM-L | 50/50/30-2LM-L | -50/50/50-LM-L | 50/50/30-2XLM-L | 50/50/30-XLM-L | |||
| Travel X | [mm] | 50 | 50 | 50 | 50 | 50 | 50 | ||
| Travel Y | [mm] | 50 | 50 | 50 | 50 | 50 | 50 | ||
| Travel Z | [mm] | 30 | 50 | 30 | 50 | 30 | 50 | ||
| Repeatability unidirectional | [µm] | ± 0.2 | ± 0.2 | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 | ||
| Repeatability bidirectional | [µm] | ± 0.3 | ± 0.3 | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 | ||
| Positioning speed | [mm/s] | 5 | 5 | 50 | 50 | 50 | 50 | ||
| Max. speed | [mm/s] | 7.5 | 7.5 | 75 | 75 | 75 | 75 | ||
| Max. load Fx | [N] | 10 | 10 | 12 | 12 | 12 | 12 | ||
| Max. load Fy | [N] | 10 | 10 | 12 | 12 | 12 | 12 | ||
| Max. load Fz | [N] | 20 | 10 | 24 | 12 | 43 | 24 | ||
| Number of motors | 2 | 1 | 2 | 1 | 2 | 1 | |||
| Motor | Piezo motor | Piezo motor | Nanomotion | ||||||
| Feedback | Linear scale | ||||||||
| Resolution measuring system | 0.1 µm, optional up to 0.005 µm or without measuring system | ||||||||
| Guide | Cross roller | ||||||||
| Length | [mm] | 155 | |||||||
| Width | [mm] | 155 | |||||||
| Height | [mm] | 195 | |||||||
| Lubrication liquid | [mbar] | up to 10-8 | |||||||
| Lubrication dry | [mbar] | up to 10-11 | |||||||
| Max. bakeout temperature | [deg] | 120 | |||||||
| Variants cleanroom | up to cleanroom class ISO 4 (higher on request) | ||||||||
| Beam variants | UV, DUV, EUV (X-ray, gamma on request) | ||||||||
| Variants magnetism | magnetic | low-magnetic | magnet-free | ||||||||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||||||||
Related Products
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.
We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.
The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.
Typically, the customization process includes:
- Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
- Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
- Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
- Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
- Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions
The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.
Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.
The achievable cleanroom class depends, among other factors, on:
- the selected mechanics and bearing concept
- the drive and measurement systems used
- materials, surface treatments, and lubricants
- motion profiles and operating conditions, e.g., enclosure and extraction
- multi-level cleaning processes, handling, and commissioning
All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.
Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:
- All parts vacuum-cleaned
- Liquid lubrication with UHV oil for pressures down to 10-6 mbar
- Maximum bake-out temperature 80 °C
- Equipped with Phytron stepper motors
- Stainless steel components (ball screw, guides, bearings, screws)
- Kapton or PTFE cabling
- Kapton or ceramic Sub-D connectors
- Untreated aluminum surfaces
- Bores and cavities with venting holes, vented screws, or slotted washers
- No covers
- Assembled in our cleanroom
- Final cleaned
- Delivered in evacuated, double plastic packaging
Click here for more systems:
Overview of our standard axes
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
