KT106/170
Vacuum / Cleanroom XY stages
782445:002.26
XY Sample Stage
HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s
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Fields of application
Positioning for semiconductor technology, micro- or nanofabrication, mass spectrometer, photoelectron spectrometers, laboratory applications, microscopy, research in high vacuum, sample preparation, sample scanning, sample handling, wafer inspection, material research, material analysis
| KT106/170 | -136/-170-SM-HV | ||
| Travel | [mm] | 136 x 170 | |
| Repeatability unidirectional | [μm] | ± 0.6 | |
| Repeatability bidirectional | [μm] | ± 0.9 | |
| Positioning speed | [mm/s] | 10 | |
| Max. speed | [mm/s] | 20 | |
| Max. load Fx | [N] | 49 | |
| Max. load Fy | [N] | 49 | |
| Max. load Fz | [N] | 79 | |
| Length | [mm] | 310 | |
| Width | [mm] | 310 | |
| Height | [mm] | 75 | |
| Weight | [kg] | 5 | |
| Lubrication liquid | [mbar] | up to 10-7 | |
| Max. Bakeout temperature | [deg] | 100 | |
| Motor | Stepper Motor | ||
| Spindle type | 1214.532/2.8.203.250BR T5P / 181180 | ||
| Spindle lead | 2 | ||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | ||
| Resolution Measuring system | Open Loop | ||
| Optional features | Available with high-resolution measuring system, break , custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 4 (higher on request) | ||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||
| Variants Magnetism | magnetic | ||
| Variants vacuum | all ranges up to 10E-7 mbar HV | ||
Used Standard Components
KGT 1214
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