KDT310-SM-HV
Vacuum / Cleanroom XY stages

782330:032.26
KDT310-SM-HV - Vacuum / Cleanroom XY stages

 

Heavy load XY stage

HV, DUV, Cleanroom ISO 6, travel 100 x 100 mm, rep up to 0.7 µm, speed 20 mm/s, load 20 kg

  • Clean room: variants up to class ISO 6 (higher on request)
  • Vakuum: all ranges HV up to 10-8 mbar
  • Lubrication: liquid up to 10-8 mbar
  • Max. bakeout temperature: 100°C
  • Aperture in X with 90 x 90 mm, Y 150 x 150 mm
Optionally configurable:
  • With and without measuring system
  • Can be combined with rotary stages (e.g. DT155) for rotary applications
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Highly loadable XY aperture system

The positioning system with aperture was combined from two linear stages to design a precise and heavy-duty XY stage for applications in high vacuum and ultra-high vacuum. Its concept with profile rail guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.

It can be easily combined with the DT155 rotary stage, resulting in a wide range of applications.

Fields of application

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron

 

KDT310   -100-SM -100-SM-L
Standard System   LT310 LT310
Travel [mm] 100 x 100 100 x 100
Repeatability unidirectional [μm] ± 1.6 ± 0.7
Repeatability bidirectional [μm] ± 2.1 ± 0.5
Positioning speed [mm/s] 10 10
Max. speed [mm/s] 20 20
Max. load Fx [N] 196 196
Max. load Fy [N] 196 196
Length [mm] 310 310
Width [mm] 310 310
Height [mm] 100 100
Aperture X [mm] 90 x 90
Aperture Y [mm] 150 x 150
Weight [kg] 17
Lubrication liquid [mbar] up to 10-8
Max. Bakeout temperature [deg] 100
Drive   Ball Screw 1214.545/1.8.138.188R P3P
Screw lead   1
Bearing   profile rail
Motor   Stepper Motor
Feedback   Open Loop Linear Scale
Resolution measuring system without 0.05 µm, optional up to 0.001 µm
Optional features   Lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10E-8 mbar HV

 

Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

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Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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