Vacuum / Cleanroom XY stages

KDT300 - Vacuum / Cleanroom XY stages


Heavy load xy scanning stage

UHV, DUV / EUV, cleanroom ISO 4, travel 10 - 100 mm, rep 0.7 µm, 30 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Aperture: 80 x 80 mm
Optionally configurable:
  • With and without measuring system
  • Optionally with lead screw drive or lubricated ball screw drive for higher speeds
  • Can be combined with rotary stages (e.g. DT155) for rotary applications
  • Material selection and lubrication adapted to the application
  • Configuration for clean room, laboratory or production
  • Customized development with 3D design, prototypes, series production
  • Optionally with controller FMC400/450

Highest stability in the nanometer range, even in dry operation

The positioning system with aperture for transmitted light has been combined from two LT300 linear stages to form a precise and heavy-duty XY stage for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. The system runs completely lubricant-free. Its concept of crossed roller guides and lead screw enables enormously high stability in the nanometer range. Optionally, this system can be designed with lubricated ball screw drives for higher speeds.

Fields of application

Precision positioning of heavy loads, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, camera alignment, materials research, materials analysis, beamline, accelerator, synchrotron


KDT300 -10-SM-10-SM-L-50-SM-50-SM-L-100-SM-100-SM-L
Standard System LT300LT300LT300LT300LT300LT300
Travel[mm]10 x 1010 x 1050 x 5050 x 50100 x 100100 x 100
Repeatability unidirectional[μm]± 2.8± 0.7± 2.9± 0.4± 2.9± 0.4
Repeatability bidirectional[μm]± 4± 0.5± 4± 0.5± 4± 0.5
Positioning speed[mm/s]555555
Max. speed[mm/s]101010101010
Max. load Fx[N]444444444444
Max. load Fy[N]444444444444
Max. load Fz[N]120120120120120120
Aperture[mm]80 x 80
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Motor Stepper Motor
Bearing cross roller bearings stainless steel, hybrid
Feedback Open LoopLinear ScaleOpen LoopLinear ScaleOpen LoopLinear Scale
Resolution Measuring system 0.1 µm 0.1 µm 0.1 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism magnetic
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0