KDT300
Vacuum / Cleanroom XY stages

782475:002.26
KDT300 - Vacuum / Cleanroom XY stages

 

Heavy load xy scanning stage

UHV, DUV / EUV, cleanroom ISO 4, travel 10 - 100 mm, rep 0.7 µm, 30 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Aperture: 80 x 80 mm
Optionally configurable:
  • With and without measuring system
  • Optionally with lead screw drive or lubricated ball screw drive for higher speeds
  • Can be combined with rotary stages (e.g. DT155) for rotary applications
  • Material selection and lubrication adapted to the application
  • Configuration for clean room, laboratory or production
  • Customized development with 3D design, prototypes, series production
  • Optionally with controller FMC400/450

Highest stability in the nanometer range, even in dry operation

The positioning system with aperture for transmitted light has been combined from two LT300 linear stages to form a precise and heavy-duty XY stage for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. The system runs completely lubricant-free. Its concept of crossed roller guides and lead screw enables enormously high stability in the nanometer range. Optionally, this system can be designed with lubricated ball screw drives for higher speeds.

Fields of application

Precision positioning of heavy loads, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, camera alignment, materials research, materials analysis, beamline, accelerator, synchrotron

 

KDT300   -10-SM -10-SM-L -50-SM -50-SM-L -100-SM -100-SM-L
Standard System   LT300 LT300 LT300 LT300 LT300 LT300
Travel [mm] 10 x 10 10 x 10 50 x 50 50 x 50 100 x 100 100 x 100
Repeatability unidirectional [μm] ± 2.8 ± 0.7 ± 2.9 ± 0.4 ± 2.9 ± 0.4
Repeatability bidirectional [μm] ± 4 ± 0.5 ± 4 ± 0.5 ± 4 ± 0.5
Positioning speed [mm/s] 5 5 5 5 5 5
Max. speed [mm/s] 10 10 10 10 10 10
Max. load Fx [N] 44 44 44 44 44 44
Max. load Fy [N] 44 44 44 44 44 44
Max. load Fz [N] 120 120 120 120 120 120
Length [mm] 370 370 360 360 340 340
Width [mm] 330 330 300 300 300 300
Height [mm] 120 120 120 120 120 120
Aperture [mm] 80 x 80
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop Linear Scale Open Loop Linear Scale Open Loop Linear Scale
Resolution Measuring system   0.1 µm   0.1 µm   0.1 µm
Optional features   lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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