Vacuum / Cleanroom compact multi axes systems & aligner

Art. ID 212382
MP53-3-PM - Vacuum / Cleanroom compact multi axes systems & aligner


High resolution micropositioner

HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load

  • Vacuum: all ranges HV / UHV / EUV
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • Available as magnetic, low-magnetic and magnet-free version
  • Optionally with high-resolution measuring system for repeatability up to 0.005 µm
  • Combinable with rotary stages for rotary applications
  • Individual adaptation to the installation situation in the chamber
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with Controller FMC400/450

Miniaturized XYZ manipulator for demanding applications

The MP53 manipulator is a miniaturized 3-axis system for X, Y and Z motion in very limited installation space. Travel ranges of 10 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum.

Application areas

Precision positioning on smallest installation space for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scan, sample handling, camera adjustment, sensor adjustment, material research, material analysis, beamline, accelerator, synchrotron, miniaturization


MP-53-3  -10-PM-L
Travel[mm] 10
Repeatability unidirectional[µm] ± 0.2
Repeatability bidirectional[µm] ± 0.3
Positioning speed[mm/s] 5
Max. load Fx[N] 5
Max. load Fy[N] 5
Max. load Fz[N] 5
Motor   Piezo Motor
Feedback  Linear Scale
Guide Cross roller Stainless steel, hybrid, optional full ceramic
Vacuum[mbar]up to 10-11  HV/UHV/EUV
Lubrication liquic[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. bakeout temperature[deg]120
Magnetism Variants magnetic | low-magnetic | magnet-free


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0