MP53-3-PM
Vacuum / Cleanroom compact multi axes systems & aligner
Art. ID 212382
High resolution micropositioner
HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load
|
|
|
Optionally configurable:
|
Miniaturized XYZ manipulator for demanding applications
The MP53 manipulator is a miniaturized 3-axis system for X, Y and Z motion in very limited installation space. Travel ranges of 10 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum.
Application areas
Precision positioning on smallest installation space for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scan, sample handling, camera adjustment, sensor adjustment, material research, material analysis, beamline, accelerator, synchrotron, miniaturization
MP-53-3 | -10-PM-L | ||||||
Travel | [mm] | 10 | |||||
Repeatability unidirectional | [µm] | ± 0.2 | |||||
Repeatability bidirectional | [µm] | ± 0.3 | |||||
Positioning speed | [mm/s] | 5 | |||||
Max. load Fx | [N] | 5 | |||||
Max. load Fy | [N] | 5 | |||||
Max. load Fz | [N] | 5 | |||||
Motor | Piezo Motor | ||||||
Feedback | Linear Scale | ||||||
Guide | Cross roller Stainless steel, hybrid, optional full ceramic | ||||||
Length | [mm] | 90 | |||||
Width | [mm] | 55 | |||||
Height | [mm] | 60 | |||||
Vacuum | [mbar] | up to 10-11 HV/UHV/EUV | |||||
Lubrication liquic | [mbar] | up to 10-8 | |||||
Lubrication dry | [mbar] | up to 10-11 | |||||
Max. bakeout temperature | [deg] | 120 | |||||
Magnetism Variants | magnetic | low-magnetic | magnet-free |
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Elger Matthes
Development, Consulting, Concepts, Innovation
T +49 (0) 351 88585-82 |
Ronald Schulze
Consulting, Project Management & Engineering
T +49 (0) 351 88585-67 |