MP53-3-PM
Vacuum / Cleanroom compact multi axes systems & aligner

Art. ID 212382

 

High resolution micropositioner

HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load

  • Vacuum: all ranges HV / UHV / EUV
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • Available as magnetic, low-magnetic and magnet-free version
  • Optionally with high-resolution measuring system for repeatability up to 0.005 µm
  • Combinable with rotary stages for rotary applications
  • Individual adaptation to the installation situation in the chamber
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with Controller FMC400/450

Miniaturized XYZ manipulator for demanding applications

The MP53 manipulator is a miniaturized 3-axis system for X, Y and Z motion in very limited installation space. Travel ranges of 10 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum.

Application areas

Precision positioning on smallest installation space for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scan, sample handling, camera adjustment, sensor adjustment, material research, material analysis, beamline, accelerator, synchrotron, miniaturization

 

MP-53-3     -10-PM-L
Travel [mm]   10
Repeatability unidirectional [µm]   ± 0.2
Repeatability bidirectional [µm]   ± 0.3
Positioning speed [mm/s]   5
Max. load Fx [N]   5
Max. load Fy [N]   5
Max. load Fz [N]   5
Motor       Piezo Motor
Feedback     Linear Scale
Guide   Cross roller Stainless steel, hybrid, optional full ceramic
Length [mm] 90
Width [mm] 55
Height [mm] 60
Vacuum [mbar] up to 10-11  HV/UHV/EUV
Lubrication liquic [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. bakeout temperature [deg] 120
Magnetism Variants   magnetic | low-magnetic | magnet-free

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 


Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail