DT65-LM
Vacuum / Cleanroom rotary stages
782326:011.24 (Rev 782326:005.26)
Highly dynamic rotary stage
UHV 10E-11 mbar, DUV, ISO 4 | Rotation n × 360° | Rep 0.003° | Load 1 kg | Speed 540°/s
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Optionally configurable:
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Small, highly dynamic rotary stage
The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers.
Fields of application
Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research
| DT65 | -1LM-W | |
| Travel | [deg] | nx360 |
| Repeatability unidirectional | [deg] | ± 0.003 |
| Repeatability bidirectional | [deg] | ± 0.006 |
| Positioning speed | [deg/s] | 360 |
| Max. speed | [deg/s] | 540 |
| Max. acceleration | [deg/s2] | 20000 |
| Max. load Fz | [N] | 10 |
| Max. torque Mx | [Nm] | 3.3 |
| Max. torque My | [Nm] | 3.3 |
| Max. torque Mz | [Nm] | 0.25 |
| Length | [mm] | 106 |
| Width | [mm] | 65 |
| Height | [mm] | 30 |
| Turntable | [mm] | Ø 65 |
| Aperture (optional) | [mm] | Ø 14 |
| Lubrication liquid | [mbar] | up to 10-8 |
| Lubrication dry | [mbar] | up to 10-11 |
| Max. Bakeout temperature | [deg] | 120 |
| Bearing | 2 Thin-section bearings | |
| Motor | Nanomotion (Piezo) | |
| Feedback | Angular Scale | |
| Resolution Measuring system | 0.001 deg | |
| Optional features | With or without aperture, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |
| Variants cleanroom | up to clean room class ISO 4 (higher on request) | |
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | |
| Variants magnetism | magnetic, low-magnetic (magnet-free on request) | |
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV (higher in request) |
Related Products
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.
We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.
The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.
Typically, the customization process includes:
- Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
- Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
- Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
- Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
- Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions
The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.
Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.
The achievable cleanroom class depends, among other factors, on:
- the selected mechanics and bearing concept
- the drive and measurement systems used
- materials, surface treatments, and lubricants
- motion profiles and operating conditions, e.g., enclosure and extraction
- multi-level cleaning processes, handling, and commissioning
All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.
Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:
- All parts vacuum-cleaned
- Liquid lubrication with UHV oil for pressures down to 10-6 mbar
- Maximum bake-out temperature 80 °C
- Equipped with Phytron stepper motors
- Stainless steel components (ball screw, guides, bearings, screws)
- Kapton or PTFE cabling
- Kapton or ceramic Sub-D connectors
- Untreated aluminum surfaces
- Bores and cavities with venting holes, vented screws, or slotted washers
- No covers
- Assembled in our cleanroom
- Final cleaned
- Delivered in evacuated, double plastic packaging
Click here for more systems:
Overview of our standard axes
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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