MT130
Vacuum / Cleanroom linear stages and axes

782327:084.26
MT130 - Vacuum / Cleanroom linear stages and axes

 

EUV miniature linear stage

155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3 µm, load 9 kg, speed 40 mm/s

  • Cleanroom: variants up to class ISO 5 (higher on request)
  • Vacuum: all HV / UHV ranges
  • Beam: EUV, DUV, UV
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bake-out temperature: 120°C
Options:
  • Stackable to form a compact 3-axis positioning system: MP130-3
  • Combinable with the DT130 rotary stage
  • Travel range up to 80 mm
  • High-resolution measuring system
  • EUV lubrication, flour-free / PFAS-free UHV lubrication
  • Customized development with 3D design, prototypes, series production

Compact EUV linear axis with internal motor

The miniature linear stage achieves very good running values with backlash-free cross roller bearing. The drive is integrated into the highly compact positioning system. The positioning system is also equipped with a permanent magnetic brake.

Fields of application

Positioning in small dimensions in EUV cleanrooms, e.g. camera, microscope / sensor (AFM, WLI), construction of space-saving XYZ multi-axis systems, aligner for industry and research, compact cleanroom positioning systems, wafer inspection, wafer probe alignment

 

MT130 -50-SM
Travel[mm]50
Repeatability unidirectional[μm]± 2.3
Repeatability bidirectional[μm]± 4.3
Positioning speed[mm/s]20
Max. speed[mm/s]40
Max. load Fx[N]45
Max. load Fy[N]95
Max. load Fz[N]95
Length[mm]155
Width[mm]130
Height[mm]43
Weight[kg]2.2
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Drive Ball Screw 1214.563/2.8.78.115 P3P (ISO 5)
Lead 2
Bearing cross roller bearings stainless steel, hybrid, optional full ceramic
Motor Stepper Motor
Feedback Open Loop
Optional features Travels up to 80 mm, high-resolution linear scale, custom EUV lube or fluorine-free / PFAS-free UHV lubrication, lead screw with dry lube, adapter, bore grid, cable / plugs
Variants cleanroom up to clean room class ISO 5 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request)
Variants magnetismmagnetic
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
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