MT105
Vacuum / Cleanroom linear stages and axes
782325:142.24, 782325:141.24, 782325:040.24, 782325:021.26
Micro stage
UHV 10E-11 mbar, EUV, ISO 4 | Travel 30 – 50 mm | Rep 0.4 µm | Load 5 kg | Speed 7.5 - 75 mm/s
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Optionally configurable:
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Flexible and universal for demanding environmental conditions
The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads.
Fields of application
Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, bioprinting, high-throughput production of three-dimensional cell spheroids
References
Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 | https://www.engineering.org.cn/EN/10.15302/J-ENG-2015062
| MT105 | -30-2PM-L | -50-PM-L | -30-2-LM-L | -30-2XLM-L | -50-LM-L | -50-XLM-L | |
| Travel | [mm] | 30 | 50 | 30 | 30 | 50 | 50 |
| Repeatability unidirectional | [μm] | ± 0.2 | ± 0.2 | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
| Repeatability bidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 |
| Positioning speed | [mm/s] | 5 | 5 | 50 | 50 | 50 | 50 |
| Max. speed | [mm/s] | 7.5 | 7.5 | 75 | 75 | 75 | 75 |
| Max. load Fx | [N] | 20 | 10 | 48 | 85 | 24 | 48 |
| Max. load Fy | [N] | 55 | 55 | 55 | 85 | 55 | 55 |
| Max. load Fz | [N] | 55 | 55 | 55 | 55 | 55 | 55 |
| Length | [mm] | 152 | |||||
| Width | [mm] | 105 | |||||
| Height | [mm] | 25 | |||||
| Lubrication liquid | [mbar] | up to 10-8 | |||||
| Lubrication dry | [mbar] | up to 10-11 | |||||
| Max. Bakeout temperature | [deg] | 120 | |||||
| Motor | Piezo Motor | Nanomotion | |||||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | ||||||
| Feedback | Linear Scale | ||||||
| Resolution Measuring system | 0.1 µm, optional 0.005 µm | ||||||
| Optional features | With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||||||
| Variants clean room | up to clean room class ISO 4 (higher on request) | ||||||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||||||
| Variants Magnetism | magnetic, low-magnetic, magnet-free | ||||||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||||||
Related Products
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.
We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.
The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.
Typically, the customization process includes:
- Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
- Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
- Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
- Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
- Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions
The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.
Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.
The achievable cleanroom class depends, among other factors, on:
- the selected mechanics and bearing concept
- the drive and measurement systems used
- materials, surface treatments, and lubricants
- motion profiles and operating conditions, e.g., enclosure and extraction
- multi-level cleaning processes, handling, and commissioning
All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.
Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:
- All parts vacuum-cleaned
- Liquid lubrication with UHV oil for pressures down to 10-6 mbar
- Maximum bake-out temperature 80 °C
- Equipped with Phytron stepper motors
- Stainless steel components (ball screw, guides, bearings, screws)
- Kapton or PTFE cabling
- Kapton or ceramic Sub-D connectors
- Untreated aluminum surfaces
- Bores and cavities with venting holes, vented screws, or slotted washers
- No covers
- Assembled in our cleanroom
- Final cleaned
- Delivered in evacuated, double plastic packaging
Click here for more systems:
Overview of our standard axes
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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