Vacuum / Cleanroom Multi Axes Systems



A three axes magnet free stage system. Strokes are at 200 mm for x and each 10 mm for y and z (vertical). The piezo motors used are a custom design and give the manipulator the ability to move loads of up to 2,5 kg with very high resolution. Outstanding stability in nm range is the main advantage of this system.


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0