XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) | Stroke 200 x 200 mm
Inspection and Mikroscopy

782300:265.26.oem

Highly stable non-contact optical measurement.

This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer under inspection to the microscope with high precision and enables stable and high-resolution imaging. Its concept with internal motors, cross roller guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.

High-precision analysis of the smallest details

Ideal for optical inspection of wafers, printed circuit boards and probe cards

Easily apaptable to various custom microscopes, cameras or senors

High precision surface inspection of wafers up to 200 x 200 mm

Low maintenance and with optimized price-performance ratio due to stepper motor drive

Optional extensions:

Other travels and lengths
With/without frame and base plate made of granite or aluminum
Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system
Individual solutions for cable routing
Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers
Integration into the customer-specific overall application

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Inspection and microscopy of wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, surface inspection, examination of deposits, scratches, irregularities on the surface

Specifications

782300:265.26		X	Y	Z
Standard system		KT310-SM	KT310-SM	manual
Travel	[mm]	200	200
Repeatability unidirectional	[µm]	± 3	± 3
Repeatability bidirectional	[µm]	± 5	± 5
Positioning speed	[mm/s]	30	30
Max. speed	[mm/s]	60	60
Max. load	[N]	110	110
With XY Stage	[mm]	310	310
Dimensions (L × W × H)	[mm]	550 × 315 × 550
Motor		Stepper motor	Stepper motor
Drive		1214.590/1.8.245.295 P3P	1214.590/1.8.245.295 P3P
Leed	[mm]	1	1
Bearing		Cross roller bearing	Cross roller bearing
Feedback		Open Loop	Open Loop
Optional features		Customizable travels and system dimensions, configuration with or without frame as well as base plate made of granite or aluminum, cleanroom configurations up to ISO class 6 (higher on request), customized cable routing for sensor and camera systems, integration into customer-specific complete systems
Cleanroom versions		up to cleanroom class ISO 6 (higher on request)
Beam variants		-
Magnetism variants		magnetic
Vacuum variants		on request