MP200-5 Miniature XYZ Phi Delta Positioning System, 3Z Tripod on a XY Stage, Hexapod Alternative | Travel XYZ 2 x 2 x 2 mm, Ryz 1.5 x 1.5°
XYZ Tip-Tilt System
782497:013.26
Ultra high precision 5-axis adjuster
up to 20 N load, 0.007 µm resolution for finest incremental motions
The motorized centering and levelling stage moves its five degrees of freedom extremely consistently. The system can be moved in all three directions. It can also be tilted at two angles in planarity.
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Wireless Data and Energy Transmission
His overall strength makes the manipulator in combination with a rotary stage. The MP200-5 is the only positioning system of this type that transmits energy and control data wirelessly. Therefore precise operating parameters can be realized without disturbing effects by sliding contacts.
Fields of application
High-precision alignment of objects in manufacturing and metrology equipment, rotational tomography, CT scanning, 3D inspection of components, roundness measuring equipment, semiconductor inspection, optical centering systems, calibration systems or general inspection systems
| MP200-5 (782497:014.26) | X | Y | Z | Rx | Ry | |
| Standard System | MT63-DC | MT63-DC | MT63-DC | MT63-DC | MT63-DC | |
| Travel | [mm] | 4 | 4 | 4 | 3 | 3 |
| Repeatability unidirectional | [µm] | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.00005 | ± 0.00005 |
| Repeatability bidirectional | [µm] | ± 2.5 | ± 2.5 | ± 2.5 | ± 0.00020 | ± 0.00020 |
| Positioning speed | [mm/s] | 1 | 1 | 1 | 0.8 | 0.8 |
| Max. speed | [mm/s] | 1.8 | 1.8 | 1.8 | 1.5 | 1.5 |
| Max. Load | [N] | 20 | ||||
| Length x width x height | [mm] | 235 x 200 x 100 | ||||
| Aperture | [mm] | Ø 45 | ||||
| Weight | [kg] | 10 | ||||
| Drive | Gleitgewinde, Riemen | |||||
| Screw type | M5x0,5 | |||||
| Motor | DC-Motor | |||||
| Feedback | Motor Encoder | |||||
| Resolution Measuring System | 0.1 µm (optional up to 0.001 µm) | |||||
| Material | Anodized Aluminum | |||||
| Optional features | Rotary stage, sample holder, calibreless energy supply for unlimited rotation | |||||
| Variants clean room | up to cleanroom class ISO 4 (higher on request) | |||||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | |||||
| Variants magnetism | magnetic (low-magnetic on request) | |||||
| Variants vacuum | up to 10E-6 mbar (higher on request) | |||||
Used Standard Components
MT63-DC
Related Products
Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:
Overview Clean Room & Vacuum Stages Get in touch with our technical consultant
Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.
What surfaces are available?
Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).
Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:
- Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
- Electrodynamic linear motors (ironless or iron-core).
- Piezomotors such as Piezo-Legs® or Nanomotion®.
Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Katja Weißbach
Consulting
T +49 351 88585-64
E-Mail
Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail
Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
Our references
